Precise positioning actuator for head element, head gimbal assembly with the actuator and manufacturing method of actuator

A head gimbal assembly including a head slider provided with at least one head element, a support and a precise positioning actuator fixed to said head slider and to said support for precisely positioning said at least one head element, said actuator comprising:

• a pair of movable arms each formed by a plate member including a first metal plate to be substantially in parallel with a side surface of said head slider, top end sections of said pair of movable arms being capable of displacing in response to a drive signal applied to said actuator along a direction crossing planes of said metal plates;
• and
• a base section connected between rear end sections of said pair of movable arms and formed by a plate member including a second metal plate,
• said base section and said pair of movable arms being formed by adhering said first metal plates and said second metal plate that are individually formed.

A manufacturing method of a precise positioning actuator to be fixed to a head slider provided with at least one head element and to a support, for precisely positioning said at least one head element, said method comprising the steps of:

• forming, from a plate member fabricated by laminating at least one resin layer and at least one metal plate, a pair of movable arms each including a part of said at least one metal plate and a displacement generation element formed on one surface of the movable arm, and a base section connected between rear end sections of said pair of movable arms and including a part of said at least one metal plate separated from the parts of said at least one metal plates of said pair of movable arms by a predetermined space;
• forming, from said plate member, a base section coupling member made of said at least one resin layer to couple said pair of movable arms and said base section;
• bending said base section coupling member so that said pair of movable arms become substantially perpendicular to said base section;
• and
• adhering said base section and said pair of movable arms with each other under the bending state of said base section coupling member.