Acoustic mirror and method for producing the acoustic mirror

A method for producing an acoustic mirror, which comprises the steps of:

• providing a substrate;
• providing a first insulating layer on the substrate;
• providing a first auxiliary layer on the first insulating layer;
• forming a first recess in the first auxiliary layer;
• depositing a first metal layer over the first auxiliary layer and the first recess;
• abrading by chemical mechanical polishing the first metal layer until parts of the first metal layer disposed outside the first recess have been removed;
• providing a second insulating layer over the first metal layer in the first recess and the first auxiliary layer, the second insulating layer having a thickness substantially equivalent to a thickness of the first insulating layer;
• providing a second auxiliary layer on the second insulating layer;
• forming a second recess in the second auxiliary layer;
• depositing a second metal layer over the second insulting layer and in the second recess, the second metal layer having a thickness substantially equivalent to a thickness of the first metal layer, the thickness of the first and second metal layers and the first and second insulating layers being such that a reflection condition is satisfied;
• and
• abrading by chemical mechanical polishing the second metal layer until parts of the second metal layer disposed outside the second recess have been removed.

A method for producing an acoustic mirror, which comprises the steps of:

• providing a substrate;
• providing a first insulating layer on the substrate;
• providing a first auxiliary layer on the first insulating layer;
• forming a recess in the first auxiliary layer;
• depositing a first metal layer over the first auxiliary layer and the recess;
• providing a second insulating layer over the first metal layer, the second insulating layer having a thickness substantially equivalent to a thickness of the first insulating layer;
• depositing a second metal layer over the second insulting layer, the second metal layer having a thickness substantially equivalent to a thickness of the first metal layer, the thickness of the first and second metal layers and the first and second insulating layers being such that a reflection condition is satisfied;
• and
• abrading by chemical mechanical polishing the second metal layer, the second insulation layer and the first metal layer until parts of the second metal layer, the second insulation layer and the first metal layer disposed outside the recess have been removed.

An acoustic mirror, comprising:

• a substrate;
• a first insulating layer disposed on said substrate;
• a first auxiliary layer disposed above said first insulating layer, said first auxiliary layer having a first recess formed therein;
• a first metal layer disposed on said first insulating layer within said first recess;
• a second insulating layer disposed on said first metal layer, said first insulating layer and said second insulating layer each having substantially equivalent thicknesses;
• a second auxiliary layer disposed above said second insulating layer and having a second recess formed therein;
• and
• a second metal layer disposed on said second insulating layer within said second recess, said first metal layer and said second metal layer each having substantially equivalent thicknesses, and said thicknesses of said first insulating layer, said second insulating layer, said first metal layer and said second metal layer being such that a reflection condition is satisfied.

An acoustic mirror, comprising:

• a substrate;
• a first insulating layer disposed on said substrate;
• an auxiliary layer disposed above said first insulating layer, said first auxiliary layer having a recess formed therein;
• a first metal layer disposed within said recess;
• a second insulating layer disposed on said first metal layer, said first insulating layer and said second insulating layer having substantially equivalent thicknesses;
• and
• a second metal layer disposed on said second insulating layer within said recess, said first metal layer and said second metal layer each having substantially equivalent thicknesses, and said thicknesses of said first insulating layer, said second insulating layer, said first metal layer and said second metal layer being such that a reflection condition is satisfied.