Vibrator and manufacturing method thereof
AssigneeOlympus Optical Co., Ltd.
InventorsHiroshi Miyajima, Masanori Ogata, Yukihiro Aoki, Yoshiro Nishimura
Life of this patent
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Abstract
A vibrator comprises a vibrating member and a fixing member. The vibrating member has a pair of support members, a movable plate capable of vibrating with respect to the support members, and a pair of elastic members connecting the support members to the movable plate. The fixing member holds the support members of the vibrating member. A material mainly constituting the fixing member has a larger coefficient of thermal expansion than that of a material mainly constituting the elastic members of the vibrating member.
Claims10
A vibrator comprising:
- a vibrating member including a pair of support members, a movable plate capable of vibrating with respect to the support members, and a pair of elastic members connecting the support members and the movable plate;
- and
- a fixing member holding the support members of the vibrating member, the fixing member being mainly constituted by a material that has a larger coefficient of thermal expansion than that of a material mainly constituting the elastic members of the vibrating member.
A vibrator-manufacturing method comprising:
- forming a vibrating member by use mainly of a first material, the vibrating member integrally including a frame-like support member, a movable plate capable of vibrating with respect to the support member, and a pair of elastic members connecting the support and vibrating members together;
- forming a fixing member by use mainly of a second material, the second material having a larger coefficient of thermal expansion than that of the first material;
- fixing the support member of the vibrating member to the fixing member at room temperature;
- and
- dividing the frame-like support member into two pieces.
Dependencies are inferred from the claim text.