Nano-drive for high resolution positioning and for positioning of a multi-point probe

A method of producing a multi-point probe comprising the following steps:

• (i) producing a wafer body;
• (ii) producing a first multiple of conductive probe arms positioned in co-planar and facial relationship with said wafer body;
• (iii) removing a part of said wafer body for providing said conductive probe arms freely extending from said non-removed part of said wafer body constituting a supporting body from which said conductive probe arms extend freely;
• and
• (iv) producing a third multitude of conductive tip elements extending from said distal end of said first multitude of conductive probe arms.

The method according to claims 49-51, wherein said producing of said third multitude of conductive tip elements comprising steps:

• (a) mounting of multi-point probe having said first surface of supporting body parallel to horizontal on to holding means in a microscope chamber;
• (b) selecting angles α and β describing inclination of said primary section and said secondary section of said conductive tip elements;
• (c) measuring of deposition rate by focusing an electron beam in one location for 5 minutes and measuring the resulting length of a first deposition;
• (d) tilting and rotating said holding means to give a field of view of said first deposition from an viewing angle identical to angle of said electron beam showing accordance with said selected angles α and β;
• (e) depositing a length on one of said distal ends of said conductive probe arms;
• (f) tilting and rotating said holding means to give a field of view of position for a second deposition;
• (g) depositing said length on neighbouring said distal end of said conductive probe arms;
• (h) repeating steps c through g until separation of conductive probe arms is approximately 100 nm greater than the indented separation of conductive probe arms;
• (i) selecting an angle α1 describing a inclination of said secondary section;
• (j) tilting and rotating said holding means selecting β=0 and selecting an α=α1;
• (k) extending said secondary sections in continuation of said primary sections;
• and
• (l) ensuring that the depositing progresses by alternating the position of the electron beam on first and second deposition.

A cylindrical nano-drive for in particular driving tools with high resolution and comprising

• a supporting body defining an inner open ended cylindrical space having a first longitudinal axis and an inner cylindrical surface,
• a movable member defining an outer contact surface, a first mounting surface and a second mounting surface, said outer contact surface mating said inner open ended cylindrical space, said movable member being inserted into said inner open ended cylindrical space and said contacting surface of said movable member and said inner cylindrical surface of said inner open ended cylindrical space creating a sliding fit between said movable member and said supporting body,
• said sliding fit between said movable member and said supporting body being established along the entire area of contact between said inner cylindrical surface and said outer contact surface and being provided by said outer contact surface and said inner cylindrical surface defining therebetween a spacing of a dimension having a size at any specific area of said area of contact of no more than 1 to 5 orders of power of atomic dimensions, preferably 1 to 3, 3 to 5 or 2 to 4,
• an inertial body having a first proximal end and second proximal end and providing counter weight for said movable member, and
• an actuator defining a second longitudinal axis, a third proximal end and a fourth proximal end, said actuator being connected at said third proximal end to said first proximal end of said inertial body and said fourth proximal end of said actuator being connected to said first mounting surface of said movable member, said second longitudinal axis of said actuator being substantially parallel to said first longitudinal axis of said open ended cylindrical space,
• said actuator moving said movable member in said cylindrical space by contraction and extension of said actuator in a direction parallel to said first longitudinal axis.

A multi-point testing apparatus for testing electric properties on a specific location of a test sample, comprising:

• means for receiving and supporting said test sample;
• electric properties testing means including electric generator means for generating a test signal and electric measuring means for detecting a measuring signal;
• a multi-point probe, comprising:
• a supporting body;
• a first multitude of conductive probe arms positioned in co-planar relationship with a surface of said supporting body, and freely extending from said supporting body, giving individually flexible motion of said first multitude of conductive probe arms;
• and
• said conducting probe arms originating from a process of producing said multi-point probe including producing said conductive probe arms on supporting wafer body in facial contact with said supporting wafer body and removal of a part of said wafer body providing said supporting body and providing said conductive probe arms freely extending from said supporting body;
• said multi-point probe communicating with said electric properties testing means;
• and
• nano driving means for performing said testing of electric properties thereof and comprising:
• a supporting body defining an inner open ended cylindrical space having a first longitudinal axis and an inner cylindrical surface,
• a movable member defining an outer contact surface, a first mounting surface and a second mounting surface, said outer contact surface mating said inner open ended cylindrical space, said movable member being inserted into said inner open ended cylindrical space and said contacting surface of said movable member and said inner cylindrical surface of said inner open ended cylindrical space creating a sliding fit between said movable member and said supporting body,
• said sliding fit between said movable member and said supporting body being established along the entire area of contact between said inner cylindrical surface and said outer contact surface and being provided by said outer contact surface and said inner cylindrical surface defining therebetween a spacing of a dimension having a size at any specific area of said area of contact of no more than 1 to 5 orders of power of atomic dimensions, preferably 1 to 3, 3 to 5 or 2 to 4,
• an inertial body having a first proximal end and second proximal end and providing counter weight for said movable member, and
• an actuator defining a second longitudinal axis, a third proximal end and a fourth proximal end, said actuator being connected at said third proximal end to said first proximal end of said inertial body and said fourth proximal end of said actuator being connected to said first mounting surface of said movable member, said second longitudinal axis of said actuator being substantially parallel to said first longitudinal axis of said open ended cylindrical space,
• said actuator moving said movable member in said cylindrical space by contraction and extension of said actuator in a direction parallel to said first longitudinal axis for reciprocating said multi-point probe relative said test sample so as to cause said conductive probe arms to be contacted with said specific location of said test sample.