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US 2002/0153806 A1Published application
Megasonic transducer with focused energy resonator
AssigneeProduct Systems Incorporated
InventorsMark J. Beck, Richard B. Vennerbeck
Life of this patent
Estimating the term…
Abstract
A transducer comprised of a resonator and a piezoelectric crystal for cleaning single items such as semiconductor wafers and flat panel displays. The resonator is an elongated piece of material having a cross section that is trapezoidal in shape. The parallel sides of the trapezoid form the top and bottom ends of the resonator and the nonparallel sides of the trapezoid focus the acoustic energy on the bottom end of the resonator.
Claims18
A transducer comprising:
- a resonator comprised of a distal end and a pair of angled walls, the resonator having a length “s”, with the distal end forming a face of the resonator in the shape of a rectangle having the length “s”, the pair of angled walls extending along the length “s” and the resonator having a cross section that has the shape of a trapezoid, the trapezoid having a top side and a bottom side, with the top side being wider than the bottom side and the top side being parallel to the bottom side;
- and
- an acoustic energy generating means for generating acoustic energy in the frequency range of 0.4 to 2.0 MHz, the pair of angled walls focusing the acoustic energy on the distal end.
A transducer comprising:
- a resonator having a cross section that has the shape of a trapezoid, the trapezoid having a top side and a bottom side, with the top side being wider than the bottom side and the top side being parallel to the bottom side;
- and
- an acoustic energy generating means for generating acoustic energy in the frequency range of 0.4 to 2.0 MHz, the acoustic energy generating means being positioned adjacent to the top side.
A transducer comprising:
- a resonator having a cross section that has the shape of a trapezoid, the trapezoid having a proximal side and a distal side that are parallel, and a first side and a second side that are not parallel, the first side being separated from the second side by a width “w”, the width “w” being greater along the proximal side than it is along the distal side, the resonator having a length “s” measured in a direction perpendicular to a plane containing the cross section, the resonator having a uniform shape along the entire length “s”, the resonator also having a distal end and a proximal end, the distal end comprising a face of the resonator that extends along the entire length “s” and includes the distal side, and the proximal end comprising a face of the resonator the extends parallel to the distal end and includes the proximal side;
- a piezoelectric crystal for generating acoustic energy in the frequency range of 0.4 to 2.0 MHz when power is applied to the piezoelectric crystal, the piezoelectric crystal being positioned adjacent to at least part of the proximal end;
- and
- a bonding layer positioned between the piezoelectric crystal and the resonator for attaching the piezoelectric crystal to the resonator.
1 more element
Dependencies are inferred from the claim text.