Wafer holding device
AssigneeTopcon Corporation
InventorIkuo Noguchi
Life of this patent
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Abstract
A wafer holding device, comprising a rotating baseplate, a wafer seat which is provided on the rotating baseplate coaxially with the rotating baseplate and which receives a peripheral edge of a wafer by a circumference, a predetermined number of chuck levers rotatably mounted on the wafer seat so that the chuck levers can be rotated around an axis extending in a tangential direction on a circumference of the rotating baseplate, and springs for resiliently pushing an end of the chuck lever toward the wafer seat, wherein the peripheral edge of the wafer received on the wafer seat is pinched by the wafer seat and the chuck lever.
Claims6
A wafer holding device, comprising a rotating baseplate, a wafer seat which is provided on said rotating baseplate coaxially with said rotating baseplate and which receives a peripheral edge of a wafer by a circumference, a predetermined number of chuck levers rotatably mounted on said wafer seat so that said chuck levers can be rotated around an axis extending in a tangential direction on a circumference of said rotating baseplate, and springs for resiliently pushing an end of said chuck lever toward said wafer seat, wherein said peripheral edge of the wafer received on said wafer seat is pinched by said wafer seat and said chuck lever.
Dependencies are inferred from the claim text.