Stamper-forming electrode material, stamper-forming thin film, and method of manufacturing optical disk
AssigneePioneer Corporation
InventorsMasahiro Katsumura, Tetsuya Iida, Takashi Ueno, Nobuhiro Oda
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Abstract
A stamper-forming electrode material contains Ag as its main ingredient and at least one other element, preferably Au and/or Cu. It is preferred that the Au and Cu contents each be 5.0 wt % or less. A stamper-forming thin film is made of this stamper-forming electrode material, whereby its corrosion resistance is improved to suppress damage to itself, and a high-quality stamper can hence be formed.
Claims12
A stamper-forming electrode material that constitutes a stamper-forming thin film to be coated on a surface of a resist film patterned on a supporting plate, for forming a stamper by stacking a metallic layer on a surface of said stamper-forming thin film by electroforming using said stamper-forming thin film as an electrode, and thereafter by separating said metallic layer from said resist film, together with said stamper-forming thin film,
- wherein said material contains silver (Ag) as a main ingredient thereof and at least one other element.
A stamper-forming thin film to be coated on a surface of a resist film patterned on a supporting plate, comprising a stamper-forming electrode material for forming a stamper by stacking a metallic layer on a surface of said stamper-forming thin film by electroforming using said stamper-forming thin film as an electrode, and thereafter by separating said metallic layer from said resist film, together with said stamper-forming thin film, wherein said material contains silver (Ag) as a main ingredient thereof and at least one other element.
A method of manufacturing an optical disk comprising the steps of:
- forming a resist film on a surface of a supporting plate;
- forming a predetermined pattern on said resist film by exposure to an electron beam;
- forming a stamper-forming thin film made of a stamper-forming electrode material on a surface of said patterned resist film;
- stacking a metallic layer on a surface of said stamper-forming thin film by electroforming using said stamper-forming thin film as an electrode, and thereafter by separating said metallic layer from said resist film, together with said stamper-forming thin film, to form a stamper;
- injection-molding a substrate made of a synthetic resin using said stamper as a mold;
- and
- stacking a reflector film and a protective layer on a surface of said substrate to manufacture said optical disk,
- wherein said stamper-forming electrode material of which said stamper-forming thin film is made contains Ag as a main ingredient thereof, and has at least one other element added to Ag.
Dependencies are inferred from the claim text.