Ion source vaporizer
AssigneeNissin Electric Co., Ltd.
InventorKenji Miyabayashi
Life of this patent
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Abstract
An ion source vaporizer comprises a hollow vaporizer main body, a heater, and a nozzle. The hollow vaporizer main body has an opening portion. The heater is installed outside the vaporizer main body and evaporates a solid sample within the vaporizer main body. The nozzle feeds a vapor produced within the vaporizer main body into an arc chamber. The ion source vaporizer further comprises a crucible for filling the solid sample which is provided within a cavity of the vaporizer main body, and a pressing unit for pressing a crucible bottom against a cavity bottom of the vaporizer main body. One end of the nozzle is screwed with an upper part of the crucible.
Claims5
An ion source vaporizer comprising:
- a hollow vaporizer main body having an opening portion;
- a heater for evaporating a solid sample within said vaporizer main body;
- a nozzle for feeding a vapor produced within said vaporizer main body into an arc chamber;
- a crucible for filling said solid sample, the crucible being disposed within a cavity of said vaporizer main body and being engaged with said nozzle;
- and
- a pressing unit for pressing said crucible against said vaporizer main body.
Dependencies are inferred from the claim text.