US 2002/0153486 A1 · Thermal displacement element and radiation detector using the element

Abstract

A thermal displacement element comprises a substrate, and a supported member supported on the substrate. The supported member includes first and second displacement portions, a heat separating portion exhibiting a high thermal resistance and a radiation absorbing portion receiving the radiation and converting it into heat. Each of the first and second displacement portions has at least two layers of different materials having different expansion coefficients and stacked on each other. The first displacement portion is mechanically continuous to the substrate without through the heat separating portion. The radiation absorbing portion and the second displacement portion are mechanically continuous to the substrate through the heat separating portion and the first displacement portion. The second displacement portion is thermally connected to the radiation absorbing portion. A radiation detecting device comprises a thermal displacement element and a displacement reading member fixed to the second displacement portion of the thermal displacement element and used for obtaining a predetermined change corresponding to a displacement in the second displacement portion.

Claims23

Dependent claims

A thermal displacement element comprising:

a substrate;
and
a supported member supported on said substrate, said supported member including first and second displacement portions, a heat separating portion exhibiting a high thermal resistance and a radiation absorbing portion receiving the radiation and converting it into heat,
wherein each of said first and second displacement portions has at least two layers of different materials having different expansion coefficients and stacked on each other,
said first displacement portion is mechanically continuous to said substrate without through said heat separating portion,
said radiation absorbing portion and said second displacement portion are mechanically continuous to said substrate through said heat separating portion and said first displacement portion, and
said second displacement portion is thermally connected to said radiation absorbing portion.

4 more elements

A thermal displacement element comprising:

a substrate;
and
a supported member supported on said substrate,
said supported member including a heat separating portion exhibiting a high thermal resistance, a radiation absorbing portion receiving a radiation and converting it into heat and first and second displacement portions,
wherein each of said first and second displacement portions has a plurality of individual displacement portions,
each of said plurality of individual displacement portions of said first displacement portion has at least two layers stacked on each other and composed of different materials having different expansion coefficients;
each of said plurality of individual displacement portions of said second displacement portion has at least two layers stacked on each other and composed of different materials having different expansion coefficients;
said first displacement portion is mechanically continuous to said substrate without through said heat separating portion,
said radiation absorbing portion and said second displacement portion are mechanically continuous to said substrate through said heat separating portion and said first displacement portion, and
said second displacement portion is thermally connected to said radiation absorbing portion.

7 more elements

Dependencies are inferred from the claim text.

Thermal displacement element and radiation detector using the element

Life of this patent

Thermal displacement element and radiation detector using the element

Life of this patent

Abstract

Claims23