Transmission electron microscope equipped with energy filter
AssigneeJEOL Ltd.
InventorToshikatsu Kaneyama
Life of this patent
Estimating the term…
Abstract
A transmission electron microscope (TEM) equipped with an energy filter which functions, the microscope being characterized in that rotation of the created image or diffraction pattern is prevented. The microscope has 6 lens systems, i.e., objective lens system, four intermediate lens systems, and projector lens system. If the mode of operation is varied, the total sum of the products of the numbers of turns of wire on the coils of the lenses of the various lens systems including the objective lens system, the four intermediate lens systems, and the projector lens system, and their respective excitation currents is kept constant.
Claims7
A transmission electron microscope equipped with energy filter comprising:
- an objective lens system consisting of at least one lens excited with excitation current;
- a first intermediate lens system consisting of at least one lens excited with excitation current;
- a second intermediate lens system consisting of at least one lens excited with excitation current;
- a third intermediate lens system consisting of at least one lens excited with excitation current;
- a fourth intermediate lens system consisting of at least one lens excited with excitation current;
- a projector lens system consisting of at least one lens excited with excitation current;
- and
- means for adjusting the excitation currents supplied to the lenses, thus preventing rotation of a created image.
A transmission electron microscope equipped with energy filter comprising:
- an objective lens system consisting of at least one lens excited with excitation current;
- a first intermediate lens system consisting of at least one lens excited with excitation current;
- a second intermediate lens system consisting of at least one lens excited with excitation current;
- a third intermediate lens system consisting of at least one lens excited with excitation current;
- a fourth intermediate lens system consisting of at least one lens excited with excitation current;
- a projector lens system consisting of at least one lens excited with excitation current;
- and
- means for adjusting the excitation currents supplied to the lenses;
- wherein, (1) when the number of real images formed by said lenses is even, the total sum of the products of the numbers of coil turns of the lenses of the objective lens system, the first intermediate lens system, the second intermediate lens system, the third intermediate lens system, the fourth intermediate lens system, and the projector lens system and their respective excitation currents are kept constant, and (2) when the number of real images formed is odd, the total sum is kept constant and, furthermore, the image is rotated through 180°, if the mode of operation is switched from an imaging mode to a diffraction mode or vice versa, if the magnification is varied in the imaging mode, or if the camera length is varied in the diffraction mode.
Dependencies are inferred from the claim text.