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AssigneeMultibeam Corporation
InventorsN. William Parker, Edward M. Yin, Frank Ching-Feng Tsai
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An electron beam column incorporating an asymmetrical detector optics assembly provides improved secondary electron collection. The electron beam column comprises an electron gun, an accelerating region, scanning deflectors, focusing lenses, secondary electron detectors and an asymmetrical detector optics assembly. The detector optics assembly comprises a field-free tube, asymmetrical with respect to the electron optical axis; the asymmetry can be introduced by offsetting the field-free tube from the electron optical axis or by chamfering the end of the tube. In other embodiments the detector optics assembly comprises a field-free tube and a voltage contrast plate, either or both of which are asymmetrical with respect to the electron optical axis.
An electron beam column comprising:
An electron beam column comprising:
An electron beam column comprising:
Dependencies are inferred from the claim text.