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US 2002/0153248 A1Published application
Methods of forming metal articles
OwnerRitesh P. Shah, Vladimir Segalinventors
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Abstract
Described is the production of a metal article with fine metallurgical structure and texture by a process that includes forging and rolling and control of the forging and rolling conditions. Also described is a metal article with a minimum of statically crystallized grain size and a uniform (100) cubic texture.
Claims4
A metal article, such as a sputtering target, comprising at least about 99.95 wt. % tantalum and a substantially uniform (100) cubic texture.
A high purity tantalum sputtering target comprising at least about 99.95 wt. % tantalum and a substantially uniform (100) cubic texture at the target surface.
Dependencies are inferred from the claim text.