US 2002/0153236 A1 · Electrostatically-actuated capacitive MEMS (micro electro mechanical system) switch

Abstract

An electrostatically actuated capacitive MEMS switch includes a plurality of cantilever springs which are actuated parallel to the plane of a substrate. The springs are connected to posts vertically formed on the substrate, and an insulating layer for preventing direct contact between springs and inducing switching depending on a variation in capacitance between the springs is formed on the surface of each of the springs. An opening is formed in the substrate, and the springs are located over the opening. Each of the springs has both lateral portions located on different planes and a slanted middle portion for connecting the two lateral portions to each other.

Claims32

Dependent claims

An electrostatically actuated capacitive MEMS switch comprising:

a substrate;
first and second posts installed a predetermined distance apart on the substrate;
a first cantilever spring having a rear portion connected to the first post and a leading portion located at the center of the substrate;
and
a second cantilever spring having a rear portion connected to the second post and a leading portion spaced a predetermined distance apart from the leading portion of the first spring,
wherein an insulating layer is formed on the leading portion of at least one of the first and second springs to form a variable capacitor between the leading portion of the first spring and that of the second spring.

3 more elements

An electrostatically actuated capacitive MEMS switch comprising:

a substrate;
a first post installed at one side on the substrate;
second and third posts installed a predetermined distance apart at the other side on the substrate;
a first cantilever spring having a rear portion connected to the first post and a leading portion extending toward the center of the substrate;
a second cantilever spring having a rear portion connected to the second post and a leading portion spaced a predetermined distance apart from one side of the leading portion of the first spring;
and
a third cantilever spring having a rear portion connected to the third post and a leading portion spaced a predetermined distance apart from the other side of the leading portion of the first spring,
wherein an insulating layer is formed on at least one side of both sides of the leading portion of the first spring, the inner side of the second spring facing on side of the leading portion of the first spring, and the inner side of the third spring facing on the other side of the leading portion of the first spring, so that a variable capacitor is formed between the leading portions of adjacent springs.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application

09/794,096Filed 28 Feb 2001

Published

24 Oct 2002

Term ends

Not estimatedThe source records don’t support an estimate.

Classification6 codes

H01H 59/0009
Electrostatic relays; Electro-adhesion relays: making use of micromechanics
H01G 5/14
Using variation of effective area of electrode: due to longitudinal movement of electrodes
H01G 5/40
Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture: structural…
H01H 2001/0078
Switches making use of microelectromechanical systems [MEMS]: with parallel movement of the movable contact relative to the substrate

Electrostatically-actuated capacitive MEMS (micro electro mechanical system) switch

Life of this patent

Electrostatically-actuated capacitive MEMS (micro electro mechanical system) switch

Life of this patent

Abstract

Claims32