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OwnerKazutaka Okamoto, Masayuki Doi +5inventors
InventorsKazutaka Okamoto, Masayuki Doi, Hisanori Okamura, Yasuhisa Aono, Manabu Kagawa, Satoshi Hirano, Kinya Aota
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The present invention is a cooling plate including a groove, which becomes a passage of a coolant, inside a body, wherein one or more fins are provided inside the groove, wherein the groove is covered with a lid having width larger than the groove, wherein the lid is joined to the body by friction stir welding, and wherein a weld bead formed by the joining is outside the passage, and the weld bead formed by the joining is formed within the body and further, is characterized by a manufacturing method of a cooling plate that has a first groove, which becomes a passage of a coolant, and a second groove, which has width larger than the first groove and receives a lid on the first groove, inside a body, receives the lid on the second groove, and is joined to the body, the manufacturing method of a cooling plate wherein, while the lid and the body are joined together by the friction stir welding owing to insertion of a rotation tool having a shoulder and a pin, the joining is performed so that a weld bead formed by the joining may become out of the passage, and furthermore, is characterized in that a target for sputtering is joined to the cooling plate.
A cooling plate comprising a groove, which becomes a passage of a coolant, inside a body thereof,
A cooling plate comprising grooves of a closed passage, which become a plurality of independent passages of a coolant, inside a body,
A cooling plate comprising a groove, which becomes a passage of a coolant, inside a body,
A cooling plate comprising a groove, which becomes a passage of a coolant, inside a body,
A cooling plate comprising a groove, which becomes a passage of a coolant, inside a body,
A cooling plate comprising a groove, which becomes a passage of a coolant, inside a body,
A cooling plate comprising a groove, which becomes a passage of a coolant, inside a body,
A cooling plate comprising a groove, which becomes a passage of a coolant, inside a body,
A cooling plate comprising two or more U grooves per one meter wide, which become passages of a coolant, inside a body,
A cooling plate comprising a longwise M-shaped groove, which becomes a passage of a coolant, inside a body that is a long plate,
A manufacturing method of a cooling plate that has a first groove, which becomes a passage of a coolant, and a second groove, which has width larger than the first groove and receives a lid on the first groove, inside a body, places the lid on the second groove, and is joined to the body,
A manufacturing method of a cooling plate which has a groove, which becomes a passage of a coolant, inside a body, and in which a lid is joined to the groove,
A manufacturing method of a cooling plate which has a groove, which becomes a passage of a coolant, inside a body, and in which a lid is joined to the groove,
A manufacturing method of a cooling plate which has a groove, which becomes a passage of a coolant, inside a body, and in which a lid is joined to the groove,
A manufacturing method of a cooling plate which has a groove, which becomes a passage of a coolant, inside a body, and in which a lid is joined to the groove,
A manufacturing method of a cooling plate which has a groove, which becomes a passage of a coolant, inside a body, and in which a lid is joined to the groove,
A manufacturing method of a cooling plate which has a groove, which becomes a passage of a coolant, inside a body, and in which a lid covers the groove,
A manufacturing method of a cooling plate which has a groove, which becomes a passage of a coolant, inside a body, and in which a lid covers the groove,
Dependencies are inferred from the claim text.