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US 2002/0153022 A1Published application
Method for preventing particles in a pre-clean chamber
OwnerChia-ming Kuo, Chao-Yuan Huanginventors
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Abstract
A method for preventing particles in a pre-clean chamber includes a silica material supplying step and a silica sputtering step. With this method, impacting plasma onto a silica material dislodges silica. The dislodged silica is allowed to deposit on a layer of silicon-rich oxide on the bell-jar in the pre-clean chamber to prevent the silicon-rich oxide from peeling quickly so as to extend the life of the bell-jar.
Claims6
A method for preventing particles in a pre-clean chamber, comprising
- a silica material supplying step in which a silica material is provided in the pre-clean chamber;
- and
- a silica sputtering step in which a plasma is formed in the pre-clean chamber to impact the silica material whereby silica is dislodged from the silica material to sputter in the pre-clean chamber.
Dependencies are inferred from the claim text.