Systems and methods of monitoring thin film deposition
AssigneeAgilent Technologies, Inc.
InventorsJohn D. Larson III, Herbert L. Ko, Richard K. Karlquist, Mark A. Hueschen, Kent W. Carey
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Abstract
Systems and methods of monitoring thin film deposition are described. In one aspect, a thin film deposition sensor includes an acoustical resonator (e.g., a thin film bulk acoustical resonator) that has an exposed surface and is responsive to thin film material deposits on the exposed surface. A substrate clip may be configured to attach the thin film deposition sensor to a substrate. A transceiver circuit may be configured to enable the thin film deposition sensor to be interrogated wirelessly. A method of monitoring a thin film deposition on a substrate also is described.
Claims20
A system for monitoring a thin film deposition, comprising a thin film deposition sensor comprising an acoustical resonator having an exposed surface and being responsive to thin film material deposits on the exposed surface.
A system for monitoring a thin film deposition on a substrate, comprising:
- a thin film deposition sensor having an exposed surface exposed and being responsive to thin film material deposits on the exposed surface;
- and
- a substrate clip configured to attach the thin film deposition sensor to the substrate.
A system for monitoring a thin film deposition, comprising:
- a thin film deposition sensor having an exposed surface exposed and being responsive to thin film material deposits on the exposed surface;
- and
- a transceiver circuit configured to enable the thin film deposition sensor to be interrogated wirelessly.
A method of monitoring a thin film deposition on a substrate, comprising:
- disposing within a deposition chamber a thin film deposition sensor comprising an acoustical resonator;
- and
- exposing a surface of the acoustical resonator to a thin film deposition.
The method of claim 17, further comprising wirelessly interrogating the thin film deposition sensor to determine the resonant frequency of the acoustical resonator.
Dependencies are inferred from the claim text.