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AssigneeKarl Suss Dresden GmbH
InventorsClaus Dietrich, Botho Hirschfeld, Dietmar Runge, Michael Teich, Stefan Schneidewind
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The invention relates to a tester for pressure sensors (1) in the wafer compound or isolated pressure sensors having a recess for the pressure sensors as well as means for electrical contacting (7) of the electrical connections of at least one of the pressure sensors. The invention is intended to make it possible to test pressure sensors still in a wafer compound for their function. According to the invention, a pressure head (9) is provided which has an interior space (10) open on one side, the open face (11) of which is capable of being mounted on the pressure sensor (1) in such a way that the interior space (10) is tightly sealed by the latter. In this way a static or dynamic pressure of specified amount and duration can be exerted on the sensor element (4) at least so that the sensor element (4) is moved out of its resting position. At the same time, the electrical connections (7) of the selected pressure sensor (1) are connected with an electrical evaluation unit (21).
Tester for pressure sensors in a wafer compound or for isolated pressure sensors having a recess for the pressure sensors as well as means for electrical contacting of the electrical connections of at least one of the pressure sensors, characterized in that a means is provided by which a static or dynamic pressure of a specified amount and duration is capable of being exerted on the sensor element (4) of at least one selected pressure sensor (1) so that the sensor element (4) is moved out of its resting position, and in that at the same time the electrical connections (7) of the selected pressure sensor (1) are connected with an electrical evaluation unit (21).
Dependencies are inferred from the claim text.