US 2002/0152625 A1 · Thickness measuring apparatus and method

Abstract

A measuring system including a linear gauge 8 is placed on a vibration isolation table 7, and this system assembly is placed in a temperature controllable, constant-temperature chamber. A specimen table 16, which has a centrally-disposed circular protrusion 16C of a diameter sufficiently smaller than a specimen under measurement, is mounted on a surface plate 2 of a linear gauge 8. The position of a measuring element 1 is measured when it is brought into contact with the centrally-disposed circular protrusion 16C, and the position of the measuring element 1 is measured when it is brought into contact with the specimen placed on the specimen table. The measured values are used to determine the thickness of the specimen.

Claims15

Dependent claims

A thickness measuring apparatus comprising:

a constant-temperature chamber;
a vibration isolation table placed in said constant-temperature chamber;
a linear gauge provided with a surface plate mounted on said vibration isolation table and a measuring element for contacting a specimen under measurement mounted on said surface plate from above, for outputting information about the position of said measuring element;
and
a specimen table mounted on said surface plate and having a centrally-disposed circular protrusion for receiving said specimen, said centrally-disposed circular protrusion having a flat surface of a diameter sufficiently smaller that said specimen.

2 more elements

Dependencies are inferred from the claim text.

Thickness measuring apparatus and method

Life of this patent

Thickness measuring apparatus and method

Life of this patent

Abstract

Claims15