Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint
AssigneeApplied Materials, Inc.
InventorsJohn M. White, Ying Yu, Michael Sugarman
Life of this patent
Estimating the term…
Abstract
A brush mounting system for a wafer scrubbing device includes a brush mandrel and a mounting assembly on which the brush mandrel is mounted. The mounting assembly includes a mounting member adapted to be mounted to a wall of the wafer scrubbing device, and a bearing secured to the mounting member. A brush support is rotatably mounted on the bearing and has an outer end that includes a contact surface adapted to contact the brush mandrel. The contact surface has a spherical profile. The brush mandrel includes a corresponding contact surface having a spherical profile, so that the brush mandrel and the mounting assembly form a spherical joint at the point of contact.
Claims28
A mounting assembly for a wafer-scrubber brush, comprising:
- a mounting member adapted to be mounted to a wall of a wafer scrubbing device;
- a bearing secured to the mounting member;
- and
- a brush support rotatably mounted on the bearing and having an outer end that includes a contact surface adapted to contact a brush mandrel, the contact surface having a spherical profile.
A mandrel adapted to mount a wafer-scrubber brush, the mandrel comprising a generally cylindrical body, the body having an end adapted to couple to a mounting support, the end including a contact surface adapted to contact the mounting support, the contact surface having a spherical profile.
A wafer scrubbing device, comprising:
- a first mounting assembly;
- and
- a brush assembly mounted to the first mounting assembly;
- the first mounting assembly and the brush assembly having respective joint portions that mate together to form a first spherical joint.
A mandrel adapted to mount a wafer-scrubber brush, the mandrel comprising a generally cylindrical body, the body having a first end adapted to couple to a first mounting support and a second end adapted to couple to a second mounting support, the first end including a first contact surface adapted to contact the first mounting support, the first contact surface having a spherical profile, the second end including a second contact surface adapted to contact the second mounting support, the second contact surface having a spherical profile.
A mounting assembly for a wafer-scrubber brush, comprising:
- a bearing;
- a brush support rotatably mounted on the bearing and having an outer end adapted to couple to a brush mandrel;
- and
- a flexure adapted to flexibly mount the bearing to a mounting member.
Dependencies are inferred from the claim text.