# US 2002/0136672 A1 · High efficiency scrubber for waste gas abatement

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- Number: US 2002/0136672 A1
- Document ID: US20020136672A1
- Status: Published application
- Kind: A1
- Application number: 09/849,136
- Filed: 2001-05-04
- Published: 2002-09-26
- Earliest claimed: 2001-03-23
- Assignees: Winbond Electronics Corp.
- Inventors: Szetsen Steven Lee; Tsung-Cheng Yang
- Web page: https://patentgrep.com/patent/US20020136672A1

## CPC

- B01J 19/121: {Coherent waves, e.g. laser beams (lasers per se H01S3/00)}
- B01D 53/75: Multi-step processes
- F23G 7/065: {using gaseous or liquid fuel}
- B01D 2259/806: Microwaves
- B01D 2259/808: Laser
- B01J 2219/0875: Gas
- F23G 2204/202: Laser
- F23G 2204/203: Microwave
- F23G 2209/142: Halogen gases, e.g. silane
- B01J: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01D: SEPARATION (separating solids from solids by wet methods B03B, B03D; by pneumatic jigs or tables B03B; by other dry methods B07; magnetic or electrostatic separation of solid materials from solid materials or fluids, separation by high-voltage electric fields B03C; centrifuges, vortex apparatus B04; presses per se for squeezing-out liquid from liquid-containing material B30B9/02; treatment of water C02F, e.g. softening by ion-exchange C02F1/42; {arrangements of air intake cleaners in gas turbine plants F02C7/05} ; arrangements or mounting of filters in air-conditioning, air-humidification or ventilation F24F13/28)
- F23G: CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION

## Abstract

A gas scrubber comprises a gas inlet pipe that provides the scrubber with gases to be processed; means for initiating reactions of decomposition that is directed to initialize the decomposition of gases; an oxygen and natural gas inlet pipes to provide the necessary gases for combustion; a chamber of decomposition into which the gases to be processed are decomposed under thermal process carried out by combustion; and means for scrubbing byproducts produced in the chamber of decomposition. The means for initiating the reactions of decomposition is directed to initialize the decomposition of gas through producing radicals thereof. Thereby, the decomposition of gases under combustion in the chamber of decomposition can be accelerated, and less thermal energy is required from the combustion.

## Claims

### Claim 1

A gas scrubber comprising:
a gas inlet pipe that provides the gas scrubber with gases to be processed;
a chamber of decomposition to which is connected the gas inlet pipe that delivers the gases to be processed, such that the gases are decomposed into a plurality of different byproducts through a thermal process in the chamber of decomposition;
a transparent means through which light can pass through, mounted onto the gas inlet pipe before the chamber of decomposition;
a laser device arranged before the chamber of decomposition such that a laser beam, output by the laser device, passes through the transparent means to decompose the gases flowing in the gas inlet pipe into a plurality of gas radicals to initiate the reaction of decomposition;
means for cooling down the plurality of byproducts produced in the chamber of decomposition; and
means for scrubbing the plurality of byproducts produced in the chamber of decomposition.

### Claim 2 (depends on 1)

The scrubber of claim 1, wherein a set of reflective mirrors is farther arranged such that the laser beam passes through the gases a plurality of times.

### Claim 3 (depends on 2)

The scrubber of claim 2, wherein the cross-section of the gas inlet pipe is 0.317 cm2.

### Claim 4 (depends on 3)

The scrubber of claim 3, wherein the flow rate in the gas inlet pipe is 16.7 cc/s.

### Claim 5 (depends on 4)

The scrubber of claim 4, wherein the laser focal point is approximately 50 cm distant from the chamber of decomposition.

### Claim 6 (depends on 5)

The scrubber of claim 5, wherein the laser pulse width is 1 μs, the spot size of focal point of the laser is approximately 0.1 to 1 mm, and the laser focus intensity is in the order of megawatts/cm2.

### Claim 7 (depends on 6)

The scrubber of claim 6, wherein the gases that are processed are fluorocarbon gases.

### Claim 8 (depends on 7)

The scrubber of claim 7, wherein approximately 109 mol/cc of gas are initially decomposed before the chamber of decomposition.

### Claim 9

A gas scrubber comprising:
a gas inlet pipe that provides the gas scrubber with gases to be processed;
a chamber of decomposition to which is connected the gas inlet pipe that delivers the gases to be processed, such that the gases are decomposed into a plurality of different byproducts through a thermal process in the chamber of decomposition;
a microwave radiation generator device arranged before the chamber of decomposition such that microwave radiation, output by the microwave radiation generator device, passes through the gas inlet pipe to decompose the gases flowing therein into a plurality of different gas radicals to initiate the reaction of decomposition;
means for cooling down the byproducts produced in the chamber of decomposition; and
means for scrubbing the plurality of byproducts produced in the chamber of decomposition.

### Claim 10

A gas scrubber comprising:
a gas inlet pipe that provides the gas scrubber with gases to be processed;
a chamber of decomposition to which is connected the gas inlet pipe that delivers the gases to be processed, such that the gases are decomposed into a plurality of different byproducts through a thermal process in the chamber of decomposition;
means for decomposing the gases flowing in the gas inlet pipe into a plurality of gas radicals to initiate the reaction of decomposition;
means for cooling down the byproducts produced in the chamber of decomposition; and
means for scrubbing the plurality of byproducts produced in the chamber of decomposition.