Spin-on-dielectric compositions with coating enhancer
AssigneeDow Global Technologies LLC
InventorsLynne K. Mills, JoLee M. Dominowski, Gene D. Rose, Deidre A. Strand, Kenneth L. Foster, Stephen F. Hahn
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AssigneeDow Global Technologies LLC
InventorsLynne K. Mills, JoLee M. Dominowski, Gene D. Rose, Deidre A. Strand, Kenneth L. Foster, Stephen F. Hahn
Estimating the term…
This invention is a composition comprising (a) an oligomer or polymer dispersible in an organic solvent, having a low dielectric constant, or being curable to form a material having a low dielectric constant, (b) at least one organic solvent and (c) less than 1000 parts by weight of a polymeric coating additive per million parts by weight of total composition (ppm). The polymeric additive is characterized in that it is miscible with component (a) and the solvent system but becomes incompatible with the mixture of component (a) and solvent during the coating process.
A composition suitable for coating to form thin films comprising:
A composition suitable for coating to form thin films comprising:
A composition suitable for coating to form thin films comprising:
Dependencies are inferred from the claim text.