Method of forming porous forming film wiring structure
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorNobuo Aoi
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Abstract
An organic-inorganic hybrid film is deposited on a substrate by introducing, into a vacuum chamber, a gas mixture of a silicon alkoxide and an organic compound and generating a plasma derived from the gas mixture. Then, a hydrogen plasma process is performed with respect to the organic-inorganic hybrid film by introducing, into the vacuum chamber, a gas containing a reducing gas and generating a plasma derived from the gas. As a result, an organic component in the organic-inorganic hybrid film eliminates therefrom and numerous fine holes are formed in hollow portions from which the organic component has eliminated, whereby a porous film composed of the organic-inorganic hybrid film is obtained.
Claims11
A method of forming a porous film, comprising the steps of:
- depositing an organic-inorganic hybrid film on a substrate by plasma enhanced CVD using a gas mixture of a silicon alkoxide and an organic compound as a reactive gas;
- and
- forming a porous film composed of said organic-inorganic hybrid film by performing a plasma process using a plasma derived from a gas containing a reducing gas with respect to said organic-inorganic hybrid film.
A method of forming a porous film, comprising the steps of:
- depositing an organic-inorganic hybrid film on a substrate by plasma enhanced CVD using a gas mixture of a silicon alkoxide and an organic compound as a reactive gas;
- and
- forming a porous film composed of said organic-inorganic hybrid film by performing a thermal process with respect to said organic-inorganic hybrid film in an atmosphere containing a reducing gas.
A method of forming a porous film, comprising the steps of:
- depositing, on a substrate, an organic-inorganic hybrid film having a siloxane skeleton;
- and
- forming a porous film composed of said organic-inorganic hybrid film by performing a plasma process using a plasma derived from a gas containing a reducing gas with respect to said organic-inorganic hybrid film.
Dependencies are inferred from the claim text.