Wafer processing system
AssigneeWaferMasters, Inc.
InventorsHiromitsu Kuribayashi, Woo Sik Yoo
Life of this patent
Estimating the term…
Abstract
A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a loading station which employs rotational motion to move a wafer carrier into a load lock. The wafer processing system includes a robot having extension, rotational, and vertical motion for accessing vertically mounted modules. The robot is internally cooled and has a heat resistant end-effector, making the robot compatible with high temperature semiconductor processing.
Claims20
A wafer processing system comprising:
- a loading station having a platform for rotating a wafer carrier from a first position to a second position, the loading station having an elevator for raising the wafer carrier into a load lock;
- a first reactor;
- and,
- a robot having extension, rotational, and vertical motion, the robot being operable to move a wafer from the wafer carrier to the first reactor.
A method for processing a semiconductor wafer comprising:
- rotating a carrier containing the wafer from a first position to a second position;
- raising the carrier into a load lock;
- moving the wafer from the carrier and into a reactor;
- processing the wafer;
- moving the wafer from the reactor and into the carrier;
- lowering the carrier from the load lock;
- and
- rotating the carrier out of the second position.
A wafer processing system comprising:
- a means for moving a wafer carrier into a load lock;
- and,
- a means for moving a wafer from the wafer carrier into a first reactor.
A wafer processing system comprising:
- a loading station having a platform for rotating a wafer carrier from a first position to a load lock position;
- a first reactor;
- and
- a robot having extension, rotational, and vertical motion, the robot being operable to move a wafer from the wafer carrier to the first reactor.
A method for processing a semiconductor wafer comprising:
- rotating a carrier containing the wafer from a first position to a load lock position;
- moving the wafer from the carrier and into a reactor;
- processing the wafer;
- moving the wafer from the reactor and into the carrier;
- and
- rotating the carrier out of the load lock position.
In a wafer processing system, a loading station comprising:
- a platform for supporting a wafer carrier thereon;
- a motor for rotating the platform from a first position to a second position;
- and
- an elevator for raising the platform into a load lock.
In a wafer processing system, a loading station comprising:
- a platform for supporting a wafer carrier thereon;
- and,
- a motor for rotating the platform from a first position and into a load lock position, wherein the wafer carrier can be enclosed within a load lock while the platform is in the load lock position.
A method for moving a wafer carrier into a load lock comprising:
- rotating the wafer carrier from a first position to a second position;
- and,
- raising the wafer carrier into the load lock.
A method for moving a wafer carrier into a load lock comprising:
- loading the wafer carrier into a loading station;
- rotating the wafer carrier into a load lock position;
- and
- enclosing the wafer carrier within the load lock.
Dependencies are inferred from the claim text.