Capacitor having a blended interface and a method of manufacture thereof
OwnerMichael L. Steigerwald, Yiu-Huen Wong +1inventors
InventorsMichael L. Steigerwald, Yiu-Huen Wong, Susan M. Zahurak
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Abstract
The present invention provides a method of manufacturing a capacitor on a semiconductor wafer. The method comprises placing a metal nitride film, such as a tantalum nitride film, on a substrate of a semiconductor wafer. A first electrode and a dielectric layer are created from the metal nitride film by subjecting the metal nitride film to a plasma oxidation process, which forms a blended interface between the first electrode and the dielectric layer. To complete the capacitor, a second electrode is formed over the dielectric. Interconnections with other semiconductor devices may also be formed on the wafer to create an operative integrated circuit.
Claims23
A method of manufacturing a capacitor, comprising:
- placing a metal nitride film on a substrate;
- creating a first electrode and a dielectric from the metal nitride film by subjecting the metal nitride film to a plasma oxidation process;
- and
- forming a second electrode over the dielectric.
A method of fabricating an integrated circuit, comprising:
- forming active devices over a semiconductor wafer;
- forming capacitors over a substrate of semiconductor wafer, including:
- placing a metal nitride film on a substrate;
- creating first electrodes and dielectrics from the metal nitride film by subjecting the metal nitride film to a plasma oxidation process;
- and
- forming second electrodes over the dielectrics;
- and
- interconnecting the active devices and capacitors to form an operative integrated circuit.
A capacitor comprising:
- a first nitride metal electrode;
- a dielectric located over the first nitride metal electrode, the dielectric including an oxide of the nitride metal electrode;
- a blended interface interposed between the first nitride metal electrode and the dielectric;
- and
- a second electrode located over the dielectric.
Dependencies are inferred from the claim text.