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US 2002/0119248 A1Published application
Method for producing ink jet recording head, and ink jet recording head produced by such method
AssigneeCanon Kabushiki Kaisha
InventorToshio Suzuki
Life of this patent
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Abstract
A method for producing an ink jet recording head, comprising steps of forming, on a substrate, a solid layer composed of soluble resin and having a pattern for constituting a liquid flow path; forming an inorganic film by low temperature film formation so as to cover the solid layer; forming a layer of a head forming material so as to cover the inorganic film; removing a part of the inorganic film for forming a discharge port; and removing the solid film thereby forming a liquid flow path communicating with the discharge port.
Claims12
A method for producing an ink jet recording head, comprising steps of:
- forming, on a substrate, a solid layer composed of soluble resin and having a pattern for constituting a liquid flow path;
- forming an inorganic film by low temperature film formation so as to cover said solid layer;
- forming a layer of a head forming material so as to cover said inorganic film;
- removing a part of said inorganic film for forming a discharge port;
- and
- removing said solid film thereby forming a liquid flow path communicating with the discharge port.
3 more elements
Dependencies are inferred from the claim text.