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US 2002/0118907 A1Published application
Optical wiring substrate, method of manufacturing optical wiring substrate and multilayer optical wiring
AssigneeFujitsu Limited
InventorsAkio Sugama, Masayuki Kato, Masatoshi Ishii, Shinya Sasaki, Tsuyoshi Aoki
Life of this patent
Estimating the term…
Abstract
An optical wiring substrate provides a slab optical waveguide having a refractive index different from a refractive index of other surrounding portions and a planar convex lens being provided continuously to a tip portion of an optical path of an optical wave guide including a core and cladding and formed on a substrate. The optical path of light passing through the planar convex lens is converted approximately by 90° with a mirror. The light reflected with the mirror is made as parallel light rays by use of a cylindrical lens.
Claims45
An optical wiring substrate comprising:
- a substrate;
- an optical waveguide being formed on said substrate and including a core and cladding;
- a slab optical waveguide and a planar convex lens continuously formed at a tip portion of an optical path of said optical waveguide;
- a mirror for reflecting said light which transmitted through said convex lens toward a direction intersecting a face of said substrate;
- and
- a lens in which the light reflected with said mirror is made as parallel light rays.
3 more elements
An optical wiring substrate comprising:
- a plurality of optical waveguides individually forming optical paths parallel to one another, each of said optical waveguides including cladding, a core, a slab optical waveguide, a planar convex lens and a reflective mirror;
- and
- one cylindrical lens provided on said optical waveguides in common for allowing light from each of said reflective mirrors provided on each of said optical waveguides to pass through and to be made as parallel light rays.
Multilayer optical wiring comprising:
- a first optical wiring substrate including:
- a first substrate;
- a first optical waveguide being formed on said substrate and including a core and cladding;
- a first slab optical waveguide and a first planar convex lens continuously formed at a tip portion of an optical path of said first optical waveguide;
- a first mirror for reflecting the light which transmitted through said first planar convex lens toward a direction intersecting a face of said substrate;
- and
- a first lens in which said light reflected with said first mirror is made as parallel light rays, and
- a second optical wiring substrate including:
- a second lens disposed opposite to said first lenses for allowing the parallel light rays from said first lenses to be made incident and condensed;
- a second substrate;
- a second mirror for reflecting the light which transmitted through said second lens toward a direction parallel to a face of said second substrate,
- a second optical waveguide being formed on said second substrate and including a core and cladding;
- and
- a second planar convex lens and slab optical waveguide continuously formed at a tip portion of an optical path of said second waveguide for allowing the light reflected with said second mirror to pass therethrough,
- wherein optical signals are connected between said first optical wiring substrate and said second optical wiring substrate.
12 more elements
An optical wiring substrate comprising:
- a substrate;
- a plurality of optical wiring of an input side having N pieces of input terminals laminated on one face of said substrate;
- and
- a plurality of optical wiring of an output side having N pieces of output terminals laminated on the other side of said substrate and orthogonalized with said N pieces of the input terminals on said substrate, said plurality of optical wiring of the output side being connected with said plurality of optical wiring of the input side one by one to each other across the different layers at each interlayer transfer position.
1 more element
An optical wiring substrate comprising:
- a substrate;
- and
- a plurality of optical fibers including N pieces of input terminals on one side of said substrate and N pieces of output terminals on another side thereof, said optical fibers being laid out approximately in L shapes on said substrate.
A method of manufacturing an optical wiring substrate comprising the steps of:
- forming an under cladding layer on a substrate;
- forming a core layer on said under cladding layer;
- forming an optical waveguide pattern layer on said core layer;
- forming a core pattern as optical waveguides by etching with said optical waveguide pattern layer as a mask;
- forming an over cladding layer after said core pattern is exposed by removing said optical waveguide pattern layer;
- forming an incline of approximately 450 as an optical via hole which reaches from said over cladding layer to said substrate;
- and
- forming a reflective film on said incline of approximately 45°.
5 more elements
A multilayer optical wiring substrate comprising:
- a substrate;
- optical waveguides which form different optical wiring layers on upper and lower faces of said substrate;
- an optical via hole which connects said optical wiring layers;
- and
- a communicative portion for communicating an inside of said optical via hole with the outside.
2 more elements
A multilayer optical wiring substrate comprising:
- a substrate;
- optical waveguides which form different optical wiring layers on upper and lower faces of said substrate;
- an optical via hole which connects said optical wiring layers;
- a hole for communicating an inside of said optical via hole with the outside;
- and
- an optical condenser being disposed inside said optical via hole.
3 more elements
A multilayer optical wiring substrate comprising:
- a substrate;
- optical waveguides being formed on said substrate and including an under cladding layer, a core layer and an over cladding layer,
- a pair of slits arranged substantially in parallel on both sides of said core layer, and
- at least one groove being provided on said over cladding layer for connecting said pair of slits.
1 more element
A multilayer optical wiring substrate comprising:
- a substrate;
- a first optical wiring layer including:
- optical waveguides being formed on said substrate and including an under cladding layer, a core layer and an over cladding layer;
- a pair of slits arranged substantially in parallel on both sides of said core layer;
- and
- at least one groove provided on said over cladding layer for connecting said pair of slits;
- and
- a second optical wiring layer of the same constitution as said first optical wiring layer, being laminated on said first optical wiring layer and including at least a pair of slits communicating with one of said pair of slits of said first optical wiring layer via said groove.
5 more elements
A method of manufacturing a multilayer optical wiring substrate comprising the steps of:
- forming an under cladding layer on a substrate;
- forming a core layer on said under cladding layer;
- forming a core pattern as optical waveguides by etching with an optical waveguide pattern layer formed on said core layer as a mask;
- forming an over cladding layer after said core pattern is exposed by removing said optical waveguide pattern layer;
- forming a pair of slits substantially in parallel on both sides of said core layer so that said slits reach a surface of said substrate;
- and
- forming at least one groove on said over cladding layer, which communicates with said pair of slits.
4 more elements
A multilayer optical wiring substrate comprising:
- a substrate;
- an optical waveguide layer being formed on one face of said substrate;
- a photo acceptance portion being formed on the other face of said substrate;
- and
- an optical interlayer transfer portion provided on said substrate for switching optical paths from said one face to said other face, said interlayer transfer portion including a through hole being formed on said substrate and a lens being formed on at least one face of said substrate formed by layering two kinds of transparent substances each different in refractive index which are filled in said through hole.
2 more elements
A method of manufacturing an optical wiring substrate comprising the steps of:
- providing a through hole on a substrate;
- filling a first transparent substance having a specific refractive index in said through hole;
- forming concave faces respectively on both surfaces of said first transparent substance by polishing;
- and
- filling a second transparent substance having a refractive index higher than a refractive index of said first transparent substance in each of said both concave faces.
2 more elements
A method of manufacturing an optical wiring substrate comprising the steps of:
- providing a through hole on a substrate;
- filling resin made of a low-refractive substance into said through hole;
- applying pressure from one face of said resin made of a low-refractive substance, to form said one face into a concave shape and to form the other face into a convex shape;
- filling resin made of a high-refractive substance into said concave face of said resin made of a low-refractive substance;
- and
- planarizing by polishing said resin made of a high-refractive substance along a face of said substrate.
3 more elements
An optical wiring substrate comprising:
- a substrate;
- an optical waveguide formed on said substrate, said optical waveguide including a core of which a tip portion is formed into a convex shape, and cladding contacting with said core and having a refractive index different from a refractive index of said core, said cladding being provided so as to abut a face of said substrate;
- and
- a cylindrical lens disposed opposite to said convex tip portion of said core such that a center of said core coincides with a center of curvature of said cylindrical lens.
1 more element
An optical wiring substrate having an optical connection structure for signals comprising:
- a substrate;
- a first optical waveguide including a core and cladding which has a refractive index different from a refractive index of said core and covers around said core, said first optical waveguide being supported on said substrate in a state that a tip portion of said core is exposed to air from said cladding;
- and
- a second optical waveguide including a core which has a tip portion exposed to air, being disposed in a position opposite to said tip portion of said first optical waveguide, and cladding which has a refractive index different from a refractive index of said core and covers around said core, said second optical waveguide being supported on said substrate for performing propagation of optical signals with said first optical waveguide.
1 more element
An optical wiring substrate comprising:
- a substrate;
- an optical waveguide layer which includes cores and cladding which has a refractive index different from a refractive index of said cores and covers around said cores;
- and
- optical transmittance distributive regions being formed axisymmetrically with respect to axial centers of said optical waveguide layers, said optical transmittance distributive regions supporting said cladding by sandwiching.
1 more element
A multilayer optical wiring substrate comprising:
- a first optical waveguide layer including a plurality of first optical waveguides parallelly arranged along an x-axis, each of said first optical waveguides including a first core and first cladding, and a first optical absorber with low optical transmittance arranged on both sides of said first optical waveguide axisymmetrically with respect to an axial center of said first core;
- and
- a second optical waveguide layer to be laminated on said first optical waveguide layer including second optical waveguides parallelly arranged along a y-axis and arranged orthogonally with respect to said first optical waveguides of said first optical waveguide layer, each of said second optical waveguides including a second core and second cladding, and a second optical absorber with low optical transmittance arranged on both sides of said second optical waveguide axisymmetrically with respect to an axial center of said second core.
A method of manufacturing a multilayer optical wiring substrate comprising the steps of:
- forming a first cladding layer on a substrate;
- forming core portions by exposure treatment via a mask after forming a core layer on said cladding layer;
- forming a second cladding layer for covering said core portions;
- forming a third cladding layer on said second cladding layer with a substance having high optical absorptance;
- and
- forming optical transmittance distributive regions axisymmetrically with respect to said cores after planarizing said third cladding layer.
3 more elements
Dependencies are inferred from the claim text.