Micromachine directional microphone and associated method
OwnerJer-Liang (Andrew) Yeh, Norman C. Tieninventors
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Abstract
A process and system to make a submicron-thick membrane with corrugation and proof mass having, for example, a thickness of about 10 microns (μm) to hundreds of microns. One of the applications is a MEMS device for a directional hearing aid which uses a fairly thin membrane with corrugation for membrane-stress release and a significant proof mass for desirable frequency response. The process is modified from an integrated polysilicon and DRIE bulk silicon micromachining process. Compared to the integrated silicon process, the present process is a simplified version with two addition steps—corrugation formation and backside release.
Claims20
A micromechanical directional microphone comprising:
- a membrane that has a corrugation;
- a support structure supporting an edge of the membrane peripheral to the corrugation;
- and
- a first proof mass operatively coupled to the membrane.
A micromechanical directional microphone comprising:
- a membrane;
- means for relieving stress in the membrane;
- and
- a first proof mass operatively coupled to the membrane.
A method for directionally detecting sound microphone comprising:
- supporting a micromechanical membrane;
- relieving stress in the membrane;
- coupling a first proof mass to the membrane;
- and
- sensing a motion of the proof mass.
Dependencies are inferred from the claim text.