Microelectromechanical apparatus with tiltable bodies including variable tilt-stop engaging portions and methods of operation and fabrication therefor

A micromechanical device, comprising:

• a microelectronic substrate;
• and
• a tiltable body on the microelectronic substrate, the tiltable body including an optical device region configured to tilt about an axis over an angular range defined by contact of an axially displaced tilt stop engaging portion of the tiltable body with a tilt stop on the substrate.

A method of fabricating a micromechanical device, the method comprising:

• forming a tiltable body on a microelectronic substrate, the tiltable body including a plate configured to tilt about an axis and a tilt stop engaging portion axially displaced with respect to the plate, wherein a range of rotation of the plate about the axis is defined by contact of the tilt stop engaging portion with a tilt stop on the substrate.

A method of fabricating a micromechanical device, the method comprising:

• forming a tiltable body on a microelectronic substrate, the tiltable body including an optical device region configured to tilt about an axis over an angular range, wherein forming the tiltable body comprises controlling the angular range independent of the extent of the optical device region.

A method of constraining movement of a tiltable body disposed on a microelectromechanical substrate, the tiltable body including a plate configured to tilt about an axis, the method comprising:

• constraining rotation of the plate to an angular range by contacting a tilt stop engaging portion of the tiltable body axially displaced with respect to the plate with a tilt stop on the substrate.