Permittivity measurement of thin films
AssigneeHoneywell Advanced Circuits, Inc.
InventorYutaka Doi
Life of this patent
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Abstract
Measurement of the permittivity of thin films is facilitated through the use of a short cylindrical metal cavity containing parallel plates between which a specimen to be measured is placed. The use of such parallel plates contained within such a cavity is particularly advantageous when swept frequency measurement methods utilizing frequency ranges from 0 to 20 GHz are employed. A test fixture which is preferred for use in providing such a cavity is disclosed as are methods of using the test fixture.
Claims20
A parallel plate test fixture for use in measuring the capacitance of a specimen comprising a metal cavity and two parallel conductive specimen contacting surfaces positioned within the cavity.
A test fixture comprising:
- a metal cap assembly, the cap assembly comprising a plunger portion;
- a metal sleeve assembly comprising a shaft, wherein the plunger portion of the cap assembly extends into the shaft;
- a base assembly positioned at least partially with the shaft, the base assembly comprising a specimen contacting surface opposite a specimen contacting surface of the plunger portion of the metal cap assembly;
- wherein the shaft, the specimen contacting surface of the plunger portion, and the specimen contacting surface of the base assembly at least partially form a metal cavity.
A method of determining a characteristic of a specimen comprising:
- providing a cavity containing parallel conductive plates and having a resonant frequency outside of a range of frequencies over which the capacitance of the specimen is to be measured;
- placing a specimen between the parallel plates and measuring the capacitance, C, of the specimen.
A method for determining a characteristic of a specimen comprising:
- providing a parallel plate test fixture coupled to a signal source;
- causing the signal source to generate a signal having a frequency greater than 1.8 GHz and measuring a frequency dependent characteristic of the specimen.
Dependencies are inferred from the claim text.