External test auxiliary device to be used for testing semiconductor device

An external test auxiliary device for use in testing a semiconductor device, comprising:

• a DUT (device under test) socket on which a semiconductor device under test is to be mounted;
• a DUT board substrate having the DUT socket mounted thereon;
• and
• an external self-test circuit formed on the DUT board substrate, wherein
• the DUT board substrate includes
• a plurality of connection terminals for establishing an electrical connection with a plurality of pins provided on a test head of a semiconductor tester;
• and
• a circuit element for establishing a desired electrical connection between the plurality of connection terminals, terminals of the DUT socket, and a plurality of circuit terminals of the external self-test circuit;
• and
• wherein the self-test circuit further includes
• a test signal transmission section which transmits a predetermined test signal to a specific circuit terminal in accordance with a control signal input by way of a specific circuit terminal;
• a response signal receiving section for receiving, in response to the test signal, a response signal input to a specific circuit terminal;
• a signal analysis section which analyzes the response signal and determines whether or not the signal is an appropriate signal;
• and
• a result signal transmission section for transmitting, to a specific circuit terminal, a test result signal representing whether or not the response signal is appropriate.

An external test auxiliary device for use in testing a semiconductor device, comprising:

• a probe card having a plurality of probes to be brought into contact with a semiconductor wafer under test;
• and
• an external self-test circuit formed on the probe card, wherein
• the probe card includes
• a plurality of connection terminals for establishing an electrical connection with a plurality of pins provided on a test head of a semiconductor tester;
• and
• a circuit element for establishing a desired electrical connection between the plurality of connection terminals, the plurality of terminals of the probe, and the plurality of circuit terminals of the external self-test circuit;
• and
• wherein the self-test circuit further includes
• a test signal transmission section which transmits a predetermined test signal to a specific circuit terminal in accordance with a control signal input by way of a specific circuit terminal;
• a response signal receiving section for receiving, in response to the test signal, a response signal input to a specific circuit terminal;
• a signal analysis section which analyzes the response signal and determines whether or not the signal is an appropriate signal;
• and
• a result signal transmission section for transmitting, to a specific circuit terminal, a test result signal representing whether or not the response signal is appropriate.