Microfluidic valve and microactuator for a microvalve
AssigneesBecton, Dickinson and Company, Nanogen, Inc.
InventorsTheodore M. Winger, John D. Evans, Noel G. Harvey
Life of this patent
Estimating the term…
Abstract
A microactuator device includes a base with at least one electrode pad and a permeation membrane. Permeation membrane is typically a water-permeable membrane that is able to deform by applying an electric charge to the electrode pad. The actuator device can be incorporated into valve assembly to open and close the valve. The valve assembly can have a reciprocating valve member operated by the deforming of the water-permeable member. Alternatively, the valve assembly can have an opening positioned to cooperate with the water-permeable membrane so that the deformation of the membrane closes the opening.
Claims34
An actuator for a microelectromechanical device, comprising:
- an electrode pad;
- a permeation membrane on said electrode pad;
- and
- an actuation member contacting said permeation membrane, where said permeation membrane expands and contracts when an electric current is applied to said electrode pad thereby moving said actuation member.
A microvalve comprising:
- a base substrate having at least one electrode pad;
- a permeation membrane on said electrode pad, said permeation membrane being deformable when an electric current is supplied to said electrode pad;
- and
- a top wall spaced from said permeation membrane to define a fluid path between said top wall and said membrane, said permeation membrane being deformable when an electric current is applied to said electrode pad to substantially close said fluid path.
A method of actuating a valve assembly of a microfluidic device, said method comprising the steps of
- providing a microfluidic valve assembly having a base substrate with at least one electrode pad, a deformable permeation membrane on said electrode pad, and a top wall spaced from said permeation membrane to define a fluid path between said permeation membrane and said top wall, and
- supplying an electric current to said electrode pad for sufficient time to expand said permeation membrane and to close said fluid path.
Dependencies are inferred from the claim text.