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US 2002/0117636 A1Published application
Electron beam irradiation system and electron beam irradiation method
AssigneeSony Corporation
InventorsJun Sasaki, Yuichi Aki, Yoshihisa Miura
Life of this patent
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Abstract
A focusing stage is provided on a slide table of a support mechanism portion on which a master is supported, at a position adjacent to the master. At the time of recording, first, the focusing stage is irradiated with an electron beam to thereby focus the electron beam, and thereafter recording is conducted by irradiating the master with the electron beam.
Claims8
An electron beam irradiation system comprising:
- a support mechanism portion having a slide table for supporting a body to be irradiated with an electron beam so that said body to be irradiated can be rotated and moved in a radial direction, and
- an electron beam irradiation means for irradiating said body to be irradiated with said electron beam while partially establishing a vacuum condition on said body to be irradiated, wherein
- a focusing stage for focusing said electron beam is stationarily disposed on said slide table of said support mechanism portion at a position adjacent to said body to be irradiated.
An electron beam irradiation method using an electron beam irradiation system comprising:
- a support mechanism portion having a slide table for supporting a body to be irradiated with an electron beam so that said body to be irradiated can be rotated and moved in a radial direction, and
- an electron beam irradiation means for irradiating said body to be irradiated with said electron beam while partially establishing a vacuum condition on said body to be irradiated, wherein
- said electron beam is focused by irradiating with said electron beam a focusing stage stationarily disposed on said slide table of said support mechanism portion at a position adjacent to said body to be irradiated, thereafter said slide table is moved, and said body to be irradiated is irradiated with said electron beam.
Dependencies are inferred from the claim text.