On-the-fly beam path error correction for memory link processing

A method for directing a laser beam toward a target location on a workpiece in response to a target location coordinate position command, comprising:

• positioning the workpiece and the laser beam relative to one another in response to the coordinate position command;
• sensing an actual coordinate position of the workpiece relative to the coordinate position command;
• producing first and second error signals indicative of a difference between the coordinate position command and the actual coordinate position;
• producing at least a first position correction signal in response to one of the first and second error signals;
• positioning a two-axis steering mirror in response to at least the first position correction signal;
• and
• deflecting the laser beam toward the target location on the workpiece.

A method for directing a laser beam toward a target location on a workpiece in response to a target location coordinate position command, comprising:

• positioning the workpiece and the laser beam relative to one another in response to the coordinate position command;
• producing first and second position signals indicative of an actual coordinate position of the positioner;
• comparing the coordinate position command and the first and second position signals to produce first and second error signals indicative of a difference between the coordinate position command and the actual coordinate position;
• producing from the first error signal a first position correction signal;
• providing a first steering mirror having a pivot point;
• locating a focusing lens having an entrance pupil between the first steering mirror and the workpiece such that the entrance pupil is located at or near the pivot point;
• and
• actuating the first steering mirror in response to the first position correction signal for deflecting the laser beam toward the target location on the workpiece.