Process for producing photovoltaic devices
OwnerRobert S. Oswaldinventor
Life of this patent
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Abstract
A continuous process for depositing a thin film layer or layers on a substrate during the production of thin film photovoltaic devices comprising moving the substrate at an elevated temperature in a reduced pressure environment past one or more sources of material to be deposited thereby forming on the substrate at least one thin film of the material from the source.
Claims20
A process for making a photovoltaic device comprising depositing at least one thin film layer on a substrate by moving the substrate past one or more sources of material to be deposited, thereby forming on the substrate at least one thin film of the material.
11 An apparatus for depositing at least one layer on a substrate to form a photovoltaic device comprising:
- a means for transporting the substrate, at least one deposition chamber, a means for depositing photovoltaically active layers on the substrate, means for depositing a front contact on the substrate, means for depositing a back contact on the substrate, wherein at least one of the depositing means can accomplish the deposition in a continuous manner as the substrate passes the depositing means.
The apparatus of claim 11 further comprising at least one laser for scribing at least one layer.
The apparatus of claim 11 wherein at least one of the depositing means is stationary.
The apparatus of claim 11 wherein the deposition chamber is a low-pressure deposition chamber.
A photovoltaic device formed by depositing one or more layers on a substrate wherein at least one of the layers is deposited in a continuous manner as the substrate passes a stationary means for depositing the layer.
Dependencies are inferred from the claim text.