Semiconductor device production management system, and semiconductor device production method
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorTsuneo Yasuda
Life of this patent
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Abstract
A cassette usage rule processing function 66 is used to store usage rules on cassettes for containing wafers. A process flow creation function 72 permits creation of reviewable process flows. A process flow check function 74 provides checks on whether the reviewable process flows comply with the cassette usage rules, and supplies only the conforming process flows to a production line. In each process, a processing condition display function 82 displays the applicable cassette usage rules for review by a line operator. If cassettes need to be changed before or after a process, a process start function 84 or a process end function 86 prompts the line operator to change the cassettes.
Claims17
A production management system for managing production of semiconductor devices, the system comprising:
- usage rule storing means for storing usage rules on containers for accommodating wafers with regard to individual processes included in a reviewable process flow;
- and
- reviewable process flow checking means for checking whether said reviewable process flow complies with said usage rules.
A production management system for managing production of semiconductor devices, the system comprising:
- production line process flow storing means for storing a plurality of processes included in a production line process flow for use on a semiconductor device production line;
- container condition storing means for storing usage rules on containers for accommodating wafers with regard to each of the processes included in said production line process flow;
- and
- usage rule supplying means for supplying said usage rules regarding said containers to either pieces of production equipment for executing the processes included in said production line process flow, or to devices installed close to said pieces of production equipment.
Dependencies are inferred from the claim text.