Removable lid and floating pivot
AssigneeSimplus Systems Corporation
InventorsTue Nguyen, Craig Alan Bercaw
Life of this patent
Estimating the term…
Abstract
A semiconductor processing system includes a chamber adapted to process a wafer, the chamber having an opening to facilitate access to the interior of the chamber. The system has a lid coupled to the chamber opening, the lid having an open position and a closed position. An actuator is connected to the lid to move the lid between the closed position and the open position. The system may include a floating pivot coupled to the lid and the actuator to align the lid with the opening when the lid closes.
Claims26
A semiconductor processing system, comprising:
- a chamber adapted to process a wafer, the chamber having an opening to facilitate access to the interior of the chamber;
- a lid coupled to the chamber opening, the lid having an open position and a closed position;
- an actuator coupled to the lid to move the lid between the closed position and the open position;
- and
- a floating pivot coupled to the lid and the actuator to align the lid with the opening when the lid closes.
A floating pivot to automatically align two objects, comprising:
- a load link having first and second portions;
- a bearing positioned between the first and second portions of the bearing;
- and
- a self-centering spring coupled to the perimeter of the bearing.
A semiconductor processing system, comprising:
- a chamber adapted to process a wafer, the chamber having an opening to facilitate access to the interior of the chamber;
- and
- a lid coupled to the chamber opening, the lid having an open position and a closed position, the open and closed positions being moved horizontally in a substantially parallel manner relative to the opening;
- and
- an actuator coupled to the lid to move the lid between the closed position and the open position.
Dependencies are inferred from the claim text.