Design method for control system, control system, adjustment method for control system, exposure method, and exposure apparatus
AssigneeNikon Corporation
InventorKouji Yoshida
Life of this patent
Estimating the term…
Abstract
In a control system, by employing optimization such as a genetic algorithm that globally searches for an optimal solution and, for evaluating given capability of the control system, uses such an evaluation function that its having unimodal when each of at least one continuously variable parameter of the control system varies is not guaranteed or a plurality of evaluation functions that vary independently of each other when each of at least one continuously variable parameter varies, an optimal solution of the at least one continuously variable parameter is obtained. Therefore, the control system optimized in terms of the given capability can be implemented.
Claims40
A design method with which to design a control system that controls an object to be controlled, the design method comprising:
- providing a control system model having a continuously variable parameter for the control system;
- providing at least one evaluation function that evaluates capability of the control system and where a unimodal is not guaranteed when the continuously variable parameter varies;
- and
- obtaining a value of the continuously variable parameter at which the evaluation function takes on an optimal value.
A design method with which to design a control system that controls an object to be controlled, the design method comprising:
- providing a control system model having a continuously variable parameter for the control system;
- providing a plurality of evaluation functions that evaluate capability of the control system and that vary independently of each other when the continuously variable parameter varies;
- and
- obtaining a value of the continuously variable parameter at which the plurality of evaluation functions take on respective optimal values simultaneously.
An adjustment method with which to adjust a control system that controls an object to be controlled and that has a continuously variable parameter, the adjustment method comprising:
- providing at least one evaluation function that evaluates capability of the control system and where a unimodal is not guaranteed when the continuously variable parameter varies;
- obtaining a value of the continuously variable parameter at which the evaluation function takes on an optimal value;
- and
- setting the continuously variable parameter to the value obtained.
An adjustment method with which to adjust a control system that controls an object to be controlled and that has a continuously variable parameter, the adjustment method comprising:
- providing a plurality of evaluation functions that evaluate capability of the control system and that vary independently of each other when the continuously variable parameter varies;
- obtaining a value of the continuously variable parameter at which the plurality of evaluation functions take on respective optimal values simultaneously;
- and
- setting the continuously variable parameter to the value obtained.
Dependencies are inferred from the claim text.