Monolithic lead-salt infrared radiation detectors and methods of formation
AssigneeLitton Systems, Inc.
InventorsNiels F. Jacksen, Jeffrey G. Tibbitt, Michael A. Sepulveda
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Abstract
A two-dimensional array of Lead-Salt detector elements monolithically formed mounted on an integrated circuit includes an integrated circuit having a passivation layer and a plurality of electrical contacts. The system also includes a delineated, sensitized Lead-Salt layer upon the passivation layer, the delineations forming a plurality of detector elements. The system additionally includes vias through the passivation layer to the electrical contacts and electrical couplers between the electrical contacts and the detector elements.
Claims31
A method for forming a two-dimensional array of Lead-Salt detector elements monolithically on an integrated circuit, the method comprising:
- providing an integrated circuit having a passivation layer covering a plurality of electrical contacts;
- depositing a Lead-Salt layer upon the passivation layer, the Lead-Salt layer having a first surface adjacent the passivation layer and a second surface opposite the first surface;
- delineating the Lead-Salt layer into a plurality of detector elements;
- creating vias through the passivation layer to the electrical contacts;
- forming electrical couplings between the electrical contacts and the detector elements;
- and
- sensitizing the Lead-Salt layer.
A two-dimensional array of Lead-Salt detector elements monolithically formed on an integrated circuit, the system comprising:
- an integrated circuit comprising a passivation layer and a plurality of electrical contacts, the passivation layer having vias to the electrical contacts;
- a delineated, sensitized Lead-Salt layer formed upon the passivation layer, the delineations forming a plurality of detector elements;
- and
- electrical couplers formed between the electrical contacts and the detector elements.
A two-dimensional array of Lead-Salt detector elements monolithically mounted on an integrated circuit, the system comprising:
- an integrated circuit comprising a passivation layer covering a plurality of electrical contacts, the passivation layer having vias to the electrical contacts;;
- a conductive material upon the passivation layer, the conductive material forming a plurality of detector element contacts and a common grid for the detector;
- a delineated, sensitized Lead-Sulfide layer formed upon the passivation layer and part of the conductive material, the delineations forming a plurality of detector elements having a pitch of less than approximately thirty microns;
- and
- electrical couplers formed between the electrical contacts and the detector element contacts.
A two-dimensional array of Lead-Salt detector elements monolithically mounted on an integrated circuit, the system comprising:
- an integrated circuit comprising a passivation layer covering a plurality of electrical contacts, the passivation layer having vias to the electrical contacts;
- a textured coating upon the passivation layer;
- a delineated, sensitized Lead-Selenide layer formed upon the textured coating, the delineations forming a plurality of detector elements having a pitch of less than approximately thirty microns;
- and
- electrical couplers formed between the electrical contacts and the detector elements.
An infrared sensor comprising:
- optics;
- and
- a two-dimensional array of Lead-Salt detector elements monolithically formed on an integrated circuit, the system comprising:
- an integrated circuit comprising a passivation layer and a plurality of electrical contacts, the passivation layer having vias to the electrical contacts;
- a delineated, sensitized Lead-Salt layer upon the passivation layer, the delineations forming a plurality of detector elements;
- and
- electrical couplers between the electrical contacts and the detector elements.
Dependencies are inferred from the claim text.