Radiation-sensitive resin composition

A radiation-sensitive resin composition comprising:

• (A) a resin which is insoluble or scarcely soluble in alkali and becomes alkali soluble by the action of an acid, the resin comprising the recurring unit (A3-1) of the following formula (3-2), and (B) a photoacid generator,
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• R3′ and R4′ individually represent a hydrogen atom, a substituted or unsubstituted alkyl group having 1-12 carbon atoms, a substituted or unsubstituted alkoxyl group having 1-12 carbon atoms, or a substituted or unsubstituted alkoxycarbonyl group having 2-13 carbon atoms, or R3′ and R4′ may form, in combination and together with the nitrogen atom with which the R3′ and R4′ groups bond, a cyclic structure having 3-15 carbon atoms, and n is an integer of 0-3.

A radiation-sensitive resin composition comprising:

• (A) a resin which is insoluble or scarcely soluble in alkali and becomes alkali soluble by the action of an acid, the resin comprising the recurring unit (A3-2) of the following formula (3-1′) and having an alicyclic structure, and (B) a photoacid generator,
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• wherein R1 represents a hydrogen atom or a methyl group, R3″ and R4″ individually represent a hydrogen atom, a substituted or unsubstituted alkyl group having 1-12 carbon atoms, a substituted or unsubstituted alkoxyl group having 1-12 carbon atoms, or a substituted or unsubstituted alkoxycarbonyl group having 2-13 carbon atoms, or R3″ and R4″ may form, in combination and together with the nitrogen atom with which the R3″ and R4″ groups bond, a cyclic structure having 3-10 carbon atoms.