Thin film magnetic head and method of manufacturing same

A method of manufacturing a thin film magnetic head comprising steps of:

• forming a first insulating layer as a write gap layer;
• providing a second insulating layer in a predetermined area on a recording medium side in contact with a surface of the first insulating layer;
• forming first and second magnetic layers to be magnetically coupled to each other in a back gap area on an opposite side of an air-bearing surface facing the recording medium, the first and second magnetic layers including two magnetic poles which face each other with the first insulating layer in between and are positioned to face with a recording medium, the first magnetic layer having a magnetic pole tip which has a uniform width portion for defining a write track width on the recording medium and extends from the air-bearing surface to a predetermined position on the second insulating layer in contact with the surfaces of the first and second insulating layers, a magnetic pole coupler located in the back gap area in contact with the second magnetic layer, and a yoke which magnetically couples the magnetic pole tip with the magnetic pole coupler;
• forming a thin film coil between the first and second magnetic layers;
• forming a third insulating layer to cover an inner surface of a recessed space surrounded by the first and second insulating layers, the magnetic pole tip, and the magnetic pole coupler;
• and
• planarizing a surface of the magnetic pole tip to form one plane with at least edge surfaces of the third insulating layer, the surface of the magnetic pole tip being on a side opposite to the first insulating layer,
• wherein the second insulating layer is formed so that a recording-medium-side edge of the second insulating layer defines a reference position to the air-bearing surface in the step of forming the second insulating layer.

A thin film magnetic head comprising:

• a write gap layer made of non-magnetic material;
• a reference layer made of non-magnetic material selectively provided in a predetermined area on a recording medium side in contact with a surface of the write gap layer;
• first and second magnetic layers including two magnetic poles which face each other with the write gap layer in between and are positioned to face with a recording medium, the first and second magnetic layers being magnetically coupled to each other in a back gap area on an opposite side of an air-bearing surface facing the recording medium, the first magnetic layer having a magnetic pole tip which has a uniform width portion for defining a write track width on the recording medium and extends from the air-bearing surface to a predetermined position on the reference layer in direct contact with the surfaces of the write gap layer and the reference layer, a magnetic pole coupler located in the back gap area in contact with the second magnetic layer, and a yoke which magnetically couples the magnetic pole tip with the magnetic pole coupler;
• a thin film coil located between the first and second magnetic layers;
• an insulating layer covering an inner surface of a recessed space surrounded by the write gap layer, the reference layer, the magnetic pole tip, and the magnetic pole coupler,
• wherein a recording-medium-side edge of the reference layer defines a reference position to the air-bearing surface;
• and
• a surface of the magnetic pole tip, the surface being on a side opposite to the write gap layer, and edge surfaces of the insulating layer are planarized in one plane.

A method of manufacturing a thin film magnetic head comprising steps of:

• forming a write gap layer made of non-magnetic material;
• selectively providing a reference layer made of non-magnetic material in a predetermined area on a recording medium side in contact with a surface of the write gap layer;
• forming first and second magnetic layers to be magnetically coupled to each other in a back gap area on an opposite side of an air-bearing surface facing the recording medium, the first and second magnetic layers including two magnetic poles which face each other with the write gap layer in between and are positioned to face with a recording medium, the first magnetic layer having a magnetic pole tip which has a uniform width portion for defining a write track width on the recording medium and extends from the air-bearing surface to a predetermined position on the reference layer in direct contact with the surfaces of the write gap layer and the reference layer, a magnetic pole coupler located in the back gap area in contact with the second magnetic layer, and a yoke which magnetically couples the magnetic pole tip with the magnetic pole coupler;
• forming a thin film coil between the first and second magnetic layers;
• forming an insulating layer to cover an inner surface of a recessed space surrounded by the write gap layer, the reference layer, the magnetic pole tip, and the magnetic pole coupler;
• and
• planarizing a surface of the magnetic pole tip to form one plane with at least edge surfaces of the insulating layer, the surface of the magnetic pole tip being on a side opposite to the write gap layer,
• wherein the reference layer is formed so that a recording-medium-side edge of the reference layer defines a reference position to the air-bearing surface in the step of forming the reference layer.