Contactor, method for manufacturing the same, and probe card using the same
AssigneesTokyo Electron Limited, Masayoshi Esashi
InventorsMasayoshi Esashi, Shinji Iino, Tomohisa Hoshino
Life of this patent
Estimating the term…
Abstract
There is disclosed a contactor which is used for testing electric characteristics of an object to be tested, the contactor comprising a contactor board, a plurality of conductive members formed through the contactor board, a plurality of beam members, and a contact terminal provided at the tip of each beam member. In this contactor, each beam member has a tip and a base end at its both ends, and has a step shape or an arch shape between the tip and the base end. The base end of each beam member is connected to each conductive member. The contact terminal member can be formed integrally with a conductive layer of the beam member.
Claims19
A contactor which is used for testing electric characteristics of an object to be tested, said contactor comprising
- a contactor board;
- a plurality of conductive members formed through the contactor board;
- a plurality of beam members each having a tip and a base end at its both ends in which at least a conductive layer is provided between both the ends and each beam member has a step between the tip and the base end, which is connected to each conductive member;
- and
- a contact terminal member provided at the tip of each beam member in which the contact terminal member is formed integrally with the conductive layer of the beam member.
A contactor which is used to test electric characteristics of an object to be tested, comprising;
- a contactor board;
- at least one conductive member formed through the contactor board;
- at least one beam member, which has one of a step shape and a slope shape and has its base end connected to the conductive member;
- and
- a contact terminal member provided at a tip of the beam member.
Dependencies are inferred from the claim text.