System and method for controlling semiconductor device manufacturing flow

A system for controlling the flow of manufacturing semiconductor devices comprising:

• a manufacturing flow recording section for recording information for each process of said manufacturing flow, containing the process identifier that describes the relevant process;
• and
• an order rule section for recording the order rule that specifies the order of appearance of each step for specific processes that contains a plurality of steps in said manufacturing flow recording section.

A method for controlling the flow of manufacturing semiconductor devices using, for each process of the manufacturing flow, a manufacturing flow recording section for recording information for each process of said manufacturing flow, containing the category attribute that indicates the classification according to materials used in said process, and a shift rule section for recording the shift rule by which the recognition of shift between each process of said manufacturing flow is decided based on said category attribute, said method comprising the steps of:

• a determination step for determining the recognition of shift between each process by applying said shift rule to the category attribute for each process recorded in said manufacturing flow recording section;
• and
• correcting the manufacturing flow by warning or by changing the category attribute for said process, when there is a process for which said determination step has denied the shift.

A method for controlling the flow of manufacturing semiconductor devices using, for each process of the manufacturing flow, a manufacturing flow recording section for recording information containing the process identifier that describe the process, and an order rule section for recording the order rule that specifies the order of appearance of each step, wherein the order rule recorded in said order rule recording section has, the step identifier, a direction identifier for indicating the test direction in the manufacturing flow of the specific processes, a prohibited step identifier for indicating the step whose presence is prohibited in the specific processes, an essential step identifier for indicating the step whose presence is essential in the specific processes, a process completion identifier for indicating the completion of the specific processes, and a test number identifier for indicating the number of steps that require testing, said method comprising the steps of:

• a determination step for determining the recognition of the order of each step and the recognition of the presence of each step by applying the order rule to the step identifier recorded in the manufacturing flow recording section;
• and
• correcting the manufacturing flow by warning or changing the process when there is a process for which said determination step has denied the order or presence thereof.