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US 2002/0055065 A1Published application
Polymers having silicon-containing acetal or ketal functional groups
Assignee3M Innovative Properties Company
InventorsLarry D. Boardman, Carl R. Kessel
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Abstract
The polymers of the present invention are characterized by having at least one pendent acetal or ketal functional group in which at least two substituents of the acetal/ketal carbon atom independently comprise at least one silicon atom. The compositions of the present invention are useful as positive working resist compositions, in particular as the top imaging layer in a bilayer resist scheme for use in the manufacture of integrated circuits.
Claims1
A method of forming resist patterns comprising the steps of:
- a) providing a polymer comprising a polymeric backbone having at least one pendent acetal/ketal functional group having an acetal/ketal carbon atom in which at least two substituents attached to the acetal/ketal carbon atom independently comprise at least one silicon atom;
- b) providing a substrate having an organic polymer base layer;
- c) coating the silicon-containing polymer onto the organic polymer base layer of the substrate to form a top layer;
- d) exposing the coated substrate to actinic radiation sufficient to form a latent image;
- and
- e) developing the latent image.
3 more elements
Dependencies are inferred from the claim text.