Integrated dynamic blending apparatus
OwnerAlexandre de Almeida Botelho, Ali Fouad El-Aghainventors
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Abstract
The present invention relates to an apparatus for dynamically blending two or more fluids to form a blended gaseous mixture. The apparatus integrates a pressure regulation section and a dynamic adjusted blending panel into a single enclosure that allows for custom blending at the fabrication tool site which permits such blending in a more efficient and less complex manner.
Claims18
An apparatus for dynamically blending a semiconductor fluid with a carrier gas for use by a fabrication tool at the fabrication tool site, said apparatus comprising a single enclosure comprising:
- a first and second source of semiconductor fluid that supply said semiconductor fluid in alternation to a fluid blender, said first and second sources operating so that one of said first and second sources is providing said semiconductor fluid to said fluid blender while said other one of said first and second sources is in standby;
- said fluid blender comprising a first and second flow train for passing said semiconductor fluid from said first or second source that is providing said semiconductor fluid, each of said first and second flow trains comprising:
- a semiconductor fluid flow path having a first output;
- a carrier gas flow path, coupled to a source of carrier gas, and having a second output;
- and
- a mixer for mixing said first and second outputs of into a third output which forms an output flow to the fabrication tool;
- and
- wherein said first and second flow trains operate in alternation such that one of said first and second flow trains is providing said output flow while said other one of said first and second flow trains is in standby.
A method for dynamically blending a semiconductor fluid with a carrier gas for use by a fabrication tool at the fabrication tool site, said method comprising the steps of:
- providing a single enclosure that houses two semiconductor fluid sources;
- operating said two semiconductor fluid sources such that one of said sources supplies said semiconductor fluid to a downstream fluid blender located in said single enclosure while the other one of said sources is on standby;
- configuring said fluid blender to provide two semiconductor fluid flow paths, each of said paths being mixed with a carrier gas from a carrier gas supply and forming two mixture outputs;
- and
- operating said two semiconductor fluid flow paths such that one of said two mixture outputs supplies said semiconductor fluid blended with said carrier gas to the fabrication tool and wherein the other one of said two mixture outputs is on standby.
Dependencies are inferred from the claim text.