Electrodes for electrolytic capacitors and production process thereof

Process according to one of the previous claims, characterized in that the substrate (7) is guided in a guide device (8) during the vacuum deposition of aluminium oxide and/or the pretreatment under reactive plasma said guide device (8) having an unwinding roll (1) from which the substrate (7) is unrolled, a rewinding roll (5) on which the treated substrate (7) is rolled and a plurality of guide rollers (9) defining a mainly angled, spiral or wound guide path for the substrate (7) from the unwinding roll (1) to the rewinding roll (5) and a dome (13) disposed above a source (3) of aluminium vapour, the two inner sides of the dome (13) exposed to the aluminium vapour belonging to opposed surface sides of the substrate (7).

Process according to one of the previous claims, characterized in that a following treatment under reactive plasma is performed in a chamber (10) in an oxygen atmosphere at low pressure, the substrate (7) being guided through said chamber (10) in continuous operation.

Process according to one of the previous claims, characterized in that the substrate (7) is submitted to a final anodic oxidation process, preferably in a solution of ammonium adipate at a voltage between about 8 and 140 V.

Roll-to-Roll-System for the production of an electrode for electrolytic capacitors being disposed in a deposition vacuum chamber (6) having gas inlet and outlet ports and a guide device (8) with an unwinding roll (1) from which the substrate (7) is unrolled, a rewinding roll (5) on which the treated substrate (7) is rolled and a plurality of guide rollers (9) defining a mainly angled, spiral or wound guide path for the substrate (7) from the unwinding roll (1) to the rewinding roll (5) and a dome disposed above a source (3) of metallic, e.g. aluminium, vapour, the two inner sides of the dome (13) exposed to the aluminium vapour belonging to opposed surface sides of the substrate (7).