Thin film magnetic head comprising at least two coil layers and method of manufacturing the same
AssigneeAlps Electric Co., Ltd.
InventorsToru Takahashi, Hisayuki Yazawa, Kiyoshi Kobayashi, Hideki Gochou
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Abstract
The present invention provides a structure in which the coil center of a first coil layer is formed on a planarized surface, a first contact portion is formed by plating on the coil center, and the coil center of a second coil layer is conductively connected to the upper surface of the first contact portion. This structure can exhibit a stable DC resistance value and good conductivity.
Claims24
A thin film magnetic head comprising a coil layer provided between lower and upper core layers, for inducing a recording magnetic field in each of the core layers;
- wherein the coil layer comprises a first coil layer and a second coil layer formed on the first coil layer with a coil insulating layer provided therebetween;
- and
- wherein the coil center of the first coil layer is formed on a planarized surface, a first contact portion is formed by plating on the coil center of the first coil layer to pass through the coil insulating layer, and the coil center of the second coil layer is conductively connected to the upper surface of the first contact portion exposed from the upper surface of the coil insulating layer.
A method of manufacturing a thin film magnetic head comprising the steps of:
- (a) forming a pole portion which comprises at least a nonmagnetic gap layer and an upper pole layer on a lower core layer and which has a predetermined length dimension from a surface facing a recording medium in the height direction;
- (b) forming a coil insulating under layer on the lower core layer so that the coil insulating under layer is behind the pole portion in the height direction, and forming a first coil layer on the coil insulating under layer by plating to a height lower than the upper surface of the pole portion;
- (c) coating the first coil layer with a resist layer and forming an aperture pattern on the coil center of the first coil layer by exposure and development, for forming a first contact portion;
- (d) forming the first contact portion by plating in the aperture pattern;
- (e) removing the resist layer and forming a coil insulating layer on the first coil layer and the first contact portion;
- (f) planarizing the upper surface of the coil insulating layer so that the upper surface of the coil insulating layer is coplanar with the upper surface of the pole portion to expose the upper surface of the first contact portion from the upper surface of the insulating layer;
- (g) forming a second coil layer by plating on the coil insulating layer to conductively connect the coil center of the second coil layer to the first contact portion;
- and
- (h) forming an upper core layer to extend from the upper pole layer to the insulating layer formed on the second coil layer.
Dependencies are inferred from the claim text.