Tunable multi-channel optical attenuator (TMCOA)

Abstract

The present invention discloses an array of multi-channel optical attenuating devices. This array of multi-channel optical attenuating devices includes this invention discloses an array of multi-channel optical attenuating devices. This array of multi-channel attenuating devices formed as a plurality of electro-optical devices support on a conductive substrate. Each of these electro-optical devices includes a membrane having an optically transparent portion. Each of these electro-optical devices further includes a flexible support for positioning the optically transparent portion of the membrane spaced from the substrate for defining an air gap. The air gap constitutes a cross-shaped gap-chamber having a horizontally and vertically elongated chambers extended from a central intersection area. The central intersection area constitutes an optical active area. Each of these electro-optical devices further includes a voltage bias circuit for applying an electrical bias between the conductive substrate and the membrane to adjust and control an air-gap thickness at the optical active area between the conductive substrate and the membrane. Each of the devices can be individually controlled to accommodate the different wavelength attenuation at each channel required by state-of-the-art optical communication network system. Any desirable numbers of devices forming the array can be manufactured on the same silicon wafer using the same process. Alignment of the array to optical fiber only need to be done on any one of the devices and therefore it significantly reduces the package cost.

Dependencies are inferred from the claim text.