Driving apparatus and exposure apparatus

A driving apparatus for moving an object, comprising:

• a stage which moves with the object mounted thereon;
• a base member supporting said stage;
• a reaction force reception structure for receiving a reaction force generated upon driving said stage;
• a first mechanical filter for damping transmission of vibration between said reaction force reception structure and a floor;
• and
• a second mechanical filter for damping transmission of vibration between said base member and the floor.

A driving apparatus for moving an object, comprising:

• a stage which moves with the object mounted thereon;
• a base member supporting said stage;
• a reaction force reception structure for receiving a reaction force generated upon driving said stage;
• and
• an elastic support interposed between said reaction force reception structure and a floor or a member substantially equivalent to the floor,
• wherein said reaction force reception structure is supported by the floor or the member substantially equivalent to the floor through said elastic support.

A driving apparatus for moving an object, comprising:

• a stage which moves with the object mounted thereon;
• a base member supporting said stage;
• a reaction force reception structure for receiving a reaction force generated upon driving said stage;
• and
• an application section for applying a force between said base member and said reaction force reception structure.

A driving apparatus for moving an object, comprising:

• a stage which moves with the object mounted thereon;
• a base member supporting said stage;
• a reaction force reception structure for receiving a reaction force generated upon driving said stage;
• an elastic support interposed between said reaction force reception structure and a floor or a member substantially equivalent to the floor;
• and
• a mount interposed between said base member and the floor or the member substantially equivalent to the floor,
• wherein said elastic support and said mount independently support said reaction force reception structure and said base member, respectively.

A driving apparatus for moving an object, comprising:

• a stage which moves with the object mounted thereon;
• a base member supporting said stage;
• and
• a reaction force reception structure for receiving a reaction force generated upon driving said stage.

An exposure apparatus comprising:

• a substrate stage which moves with a substrate mounted thereon;
• a base member supporting said substrate stage;
• a plurality of first mounts interposed between said base member and a floor or a member substantially equivalent to the floor to elastically support said base member from a lower side;
• a master stage which moves with a master mounted thereon;
• a projection optical system;
• a lens-barrel platen supporting said master stage and said projection optical system;
• and
• a plurality of second mounts interposed between said lens-barrel platen and the floor or the member substantially equivalent to the floor to elastically support said lens-barrel platen from the lower side,
• wherein when viewed from an upper side, said plurality of first mounts are arranged in an inner region of said plurality of second mounts.

An exposure apparatus comprising:

• a substrate stage which moves with a substrate mounted thereon;
• a base member supporting said substrate stage;
• a plurality of first mounts interposed between said base member and a floor or a member substantially equivalent to the floor to elastically support said base member from a lower side;
• a master stage which moves with a master mounted thereon;
• a projection optical system;
• a lens-barrel platen supporting said master stage and said projection optical system;
• and
• a plurality of second mounts interposed between said lens-barrel platen and the floor or the member substantially equivalent to the floor to elastically support said lens-barrel platen from the lower side,
• wherein when viewed from an upper side, at least two of a barycenter position of a polygon defined by said plurality of first mounts, a barycenter position of a polygon defined by said plurality of second mounts, and an optical axis of said projection optical system substantially match.

An exposure apparatus comprising:

• a substrate stage which moves with a substrate mounted thereon;
• a base member supporting said substrate stage;
• a first reaction force reception structure for receiving a reaction force generated upon driving said substrate stage;
• a master stage which moves with a master mounted thereon;
• a projection optical system;
• a lens-barrel platen supporting said master stage and said projection optical system;
• and
• a second reaction force reception structure for receiving a reaction force generated upon driving said master stage.