Carbon body, process for producing the carbon body, and electric field emission electron source using the carbon body.
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorsAkihiko Hosono, Shuhei Nakata, Masaaki Hiraki
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Abstract
Obtained are a carbon thin body having a structure making it possible to produce a planar electron source in a simple manner; a process for producing the carbon thin body; and an electric field emission type electron source using the carbon thin body. A carbon thin body that has a given thickness and is in the form of a thin layer having a front surface and a back surface, wherein at least in the front surface portion a curved wall is continuous, as is viewed in plan, to form an approximately netlike structure.
Claims20
A carbon thin body that has a given thickness and is in the form of a thin layer having a front surface and a back surface, wherein at least in its front surface portion a curved wall is continuous, as is viewed in plan, to form an approximately netlike structure.
A process for producing a carbon thin body, including the step of using plasma which is generated from gas containing a carbon compound and which a magnetic field and an electromagnetic wave are applied to, so as to form the carbon thin body on a surface of an object by chemical vapor growth,
- wherein said magnetic field and the electromagnetic wave satisfy a resonance condition for electrons in said plasma.
An electric field emission type electron source, wherein a carbon thin body in which at least in its front surface portion a curved wall is continuous to have an approximately netlike structure is used as an electron emitting member for emitting electrons forward.
Dependencies are inferred from the claim text.