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US 2002/0053686 A1Published application
Semiconductor memory device having metal contact structure and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorChunsuk Suh
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Abstract
The present invention discloses a semiconductor memory device having a bit line and a metal contact stud, wherein the metal contact stud is formed on a different layer from a layer on which the bit lines are formed.
Claims18
A semiconductor memory device comprising:
- a metal contact formed in between adjacent bit lines, said metal contact having an upper portion and a lower portion thereof;
- and
- a metal contact stud for connecting said upper portion to the lower portion, wherein the metal contact stud is formed on a different layer from a layer on which the bit lines are formed.
A method of manufacturing a semiconductor memory device, comprising the steps of:
- a) forming gate electrodes on a substrate having a cell region and a periphery region;
- b) forming a first insulating layer over the substrate, the first insulating layer covering the gate electrodes;
- c) forming first metal contact holes and stud holes in the first insulating layer;
- d) forming metal contact studs and first metal contact portions in the stud holes and the first metal contact holes, respectively;
- e) forming a second insulating layer on the first insulating layer and on the metal contact studs;
- f) forming bit line contact holes passing through the first and second insulating layers;
- g) forming bit line contacts in the bit line contact holes;
- and
- h) forming bit lines on the second insulating layer.
6 more elements
Dependencies are inferred from the claim text.